X-ray reflectometer for single layer and multilayer coating characterization at 8 keV: An interlaboratory study

2016 ◽  
Vol 87 (10) ◽  
pp. 104501 ◽  
Author(s):  
Danielle N. Gurgew ◽  
David M. Broadway ◽  
Mikhail Gubarev ◽  
Brian D. Ramsey ◽  
Don A. Gregory
Keyword(s):  
Multilayer Coating ◽  
Single Layer ◽  
Interlaboratory Study ◽  
X Ray

Multilayer Membranes For X-Ray Lithography

1993 ◽  
Vol 306 ◽  
Author(s):  
Alex R. Shimkunas ◽  
Philip E. Mauger ◽  
Lawrence P. Bourge
Keyword(s):  
Fracture Strength ◽  
Electron Cyclotron Resonance ◽  
Multilayer Coating ◽  
Single Layer ◽  
Chemical Vapor ◽  
High Fracture ◽  
X Ray ◽  
Chemical Etch ◽  
Optical Alignment ◽  
Manufacturing Yield

AbstractMultilayer x-ray lithography membranes were designed and fabricated. Consisting of alternating layers of SiC and SiNx, the membranes were designed to have low reflectance for improved optical alignment of x-ray masks, high fracture strength, superior chemicaletch resistance, and high manufacturing yield. The membranes were prepared from multilayer coatings deposited on silicon wafers in an electron cyclotron resonance chemical vapor deposition system. Membranes with less than 5% reflectance over 150 nm bandwidths were made. External SiNx layers increased the chemical etch resistance of the membranes. The fracture strength was 2–3 times that of SiC, and the membrane yield was 50% higher than that of single-layer SiC. Field-emission SEM of the multilayer coating cross-section showed the presence of 20–150 nm defects near the layer interfaces. The layering confines or stabilizes the defects, thereby increasing the membrane yield and fracture strength.

Strain, Stress, and Magnetic Surfaceanisotropy of Epitaxial FE(110)/MO (110) Multilayers

1993 ◽  
Vol 317 ◽  
Author(s):  
R.M. Osgood ◽  
B.M. Clemens ◽  
R.L. White ◽  
S. Brennan
Keyword(s):  
Strain State ◽  
Single Layer ◽  
Grazing Incidence ◽  
Magnetic Surface ◽  
Stress And Strain ◽  
Surface Anisotropy ◽  
X Ray Diffraction ◽  
X Ray ◽  
Plane Direction ◽  
Strain Stress

ABSTRACTGrazing incidence and asymmetric X-ray diffraction were used to measure the stress and strain state of Fe(110)/Mo(110) Multilayers. The highest stress in the Fe constituent of the multilayer was along the [110] in-plane direction and was due to interaction with the substrate. The Magnetic anisotropy of the Fe Multilayer constituent was measured and the magnetic surface anisotropy, which favored in-plane [001] magnetization, was deduced. In contrast, the magnetic surface anisotropy of a single layer of Fe on W preferred in-plane [110] magnetization, in agreement with the Néel Model.

Well-Aligned Graphene Oxide Nanosheets Decorated with Zinc Oxide Nanocrystals for High Performance Photocatalytic Application

2015 ◽  
Vol 14 (03) ◽  
pp. 1550007 ◽  
Author(s):  
K. Kaviyarasu ◽  
C. Maria Magdalane ◽  
E. Manikandan ◽  
M. Jayachandran ◽  
R. Ladchumananandasivam ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Graphene Oxide ◽  
High Performance ◽  
Chemical Reduction ◽  
Visible Region ◽  
Single Layer ◽  
Single Layer Graphene ◽  
Graphene Oxides ◽  
X Ray ◽  
Nanoscale Structures

Graphene oxide (GO) nanosheets modified with zinc oxide nanocrystals were achieved by a green wet-chemical approach. As-obtained products were characterized by XRD, Raman spectra, XPS, HR-TEM, EDS, PL and Photocatalytic studies. XRD studies indicate that the GO nanosheet have the same crystal structure found in hexagonal form of ZnO . The enhanced Raman spectrum of 2D bands confirmed formation of single layer graphene oxides. The gradual photocatalytic reduction of the GO nanosheet in the GO : ZnO suspension of ethanol was studied by using X-ray photoelectron (XPS) spectroscopy. The nanoscale structures were observed and confirmed using high resolution transmission electron microscopy (HR-TEM). The evolution of the elemental composition, especially the various numbers of layers were determined from energy dispersive X-ray spectra (EDS). PL properties of GO : ZnO nanosheet were found to be dependent on the growth condition and the resultant morphology revealed that GO nanosheet were highly transparent in the visible region. The photocatalytic performance of GO : ZnO nanocomposites was performed under UV irradiation. Therefore, the ZnO nanocrystals in the GO : ZnO composite could be applied in gradual chemical reduction and consequently tuning the electrical conductivity of the graphene oxide nanosheet.

scholarly journals Combined Use of Surface Texturing, Plasma Nitriding and DLC Coating on Tool Steel

Coatings ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 201
Author(s):  
Elisangela Aparecida dos Santos de Almeida ◽  
Julio Cesar Giubilei Milan ◽  
César Edil da Costa ◽  
Cristiano Binder ◽  
José Daniel Biasoli de Mello ◽  
...  
Keyword(s):  
Surface Topography ◽  
Tool Steel ◽  
Photoelectron Spectroscopy ◽  
Plasma Nitriding ◽  
Nitrided Layer ◽  
Multilayer Coating ◽  
Surface Texturing ◽  
X Ray ◽  
Dlc Coating ◽  
Hard Chrome

In cold rolling, a textured roll can be used to imprint a desired surface topography onto the sheet during rolling. This work proposes the use of diamond-like carbon (DLC) coatings to protect the surface topography of the rolls in replacement of the carcinogenic hard chrome. For that, hydrogenated amorphous carbon (a-C:H) was deposited on plasma nitrided tool steel, both for ground and textured specimens. Changes in surface topography due to DLC coating were assessed using a confocal microscope. Coating adhesion was evaluated using the method VDI 3198. The specimens were characterized using X-ray diffraction (XRD), microhardness test and scanning electron microscopy (SEM). The coating was characterized using Raman spectroscopy (RS) and X-ray photoelectron spectroscopy (XPS). The results showed a soft multilayer coating consisting of a plasma nitrided layer for load support, a Si-rich interlayer to improve adhesion and an a-C:H top layer. DLC deposition reduced the roughness of the textured specimens. The coating resulted in relatively stable friction and good durability, with small damage and negligible wear even under dry sliding.

Effects of absorber topography and multilayer coating defects on reflective masks for soft x-ray/EUV projection lithography

1993 ◽  
Author(s):  
Khanh B. Nguyen ◽  
Alfred K. K. Wong ◽  
Andrew R. Neureuther ◽  
David T. Attwood, Jr.
Keyword(s):  
Multilayer Coating ◽  
X Ray ◽  
Projection Lithography

scholarly journals Synthesis of heterovalently substituted slab perovskites Sr2–xLnxBIV1–xBxIIIO4 (BIV= Sn, Ti, BIII= Sc, In)

2021 ◽  
pp. 77-83
Author(s):  
Y.A. Titov ◽  
◽  
M.S. Slobodyanik ◽  
V.V. Chumak ◽  
M.V. Tymoshenko ◽  
...  
Keyword(s):  
Layer Structure ◽  
Single Layer ◽  
Continuous Phase ◽  
Phase Region ◽  
Heterovalent Substitution ◽  
Linear Type ◽  
X Ray ◽  
Unit Cells ◽  
Pseudobinary Systems ◽  
New Compounds

The possibility of the heterovalent substitution of A- and B-positions atoms in a single-layer slab perovskite-like structure of strontium titanate and stannate Sr2BIVO4 (BIV= Ti, Sn) by type Sr2–xLnxBIV1–xBxIIIO4 (Ln == La – Tb, BIV= Ti, Sn, BIII= Sc, In) has been established by X-ray powder diffraction methods. The bounda-ries of the heterovalent substitution of A- and B-positions atoms and the crystallographic parameters of the synthesized Sr2–xLnxBIV1–xBxIIIO4 phases with a single-layer structure are determined. The continuous phase area formation with a single-layer structure has been observed in 10 systems: Sr2–xLnxTi1–xScxO4 (Ln = La, Pr, Nd, Sm, Eu), Sr2–xLnxTi1–xInxO4 (Ln = La, Pr), Sr2–xLaxSn1–xScxO4, Sr2–xLnxSn1–xInxO4 (Ln = La, Pr). In-creasing the degree of heterovalent substitution of atoms in these systems leads to a reduction of the sym metry of the crystal lattice of phases from the tetragonal (space group I4/mmm) to the interconnected rhombic one. In the rest of the studied Sr2–xLnxBIV1–xBxIIIO4 systems, the existence of a narrow (x value significantly less than 1) phase region with a single-layer structure based on Sr3BIVO7 is observed. The character of the phase relations in the Sr2–xLnxBIV1–xBxIIIO4 systems (Ln = La – Tb, BIII= Sc, In) (BIV= Sn, Ti) and the linear type of concentra-tion dependences of the parameters of the reduced tetragonal unit cells of Sr2–xLnxBIV1–xBxIIIO4 phases with a single-layer structure indicate that, by their nature, these phases are series of solid solutions in the pseudobinary systems Sr2BIVO4 – SrLnBIIIO4 (BIV= Ti, Sn, BIII = Sc, In). The obtained data can be used to regulate the functional properties of titanates and stannates Sr2BIVO4 and materials based on them, as well as to solve the problem of a purposeful search for new compounds of the type An+1BnO3n+1 with a slab perovskite-like structure.

Effect of α-particle and X-ray irradiation on DNA synthesis in tissue cultures

1961 ◽  
Vol 154 (957) ◽  
pp. 557-570 ◽  
Keyword(s):  
Hela Cell ◽  
Tritiated Thymidine ◽  
Single Layer ◽  
Target Volume ◽  
Mouse Fibroblast ◽  
Synthesis Rate ◽  
X Rays ◽  
X Ray ◽  
Thin Thread ◽  
Thymidine Autoradiography

The effects of both α-particle and X-ray in radiation, on the DNA synthesis rate in mouse fibroblast and Hela cells in tissue culture is described. Tritiated thymidine autoradiography was used to indicate the rate of DNA synthesis in the single-layer cultures used. The results of these experiments show that: (1) The fraction of cells in a culture synthesizing DNA is not markedly affected by α-particles and X-rays in the dose used in the experiment. (2) The effect of either type of radiation is to reduce the rate of synthesis of DNA of the irradiated cells in synthesis. (3) The effect of a given dose of either type of radiation is to reduce the rate of synthesis of all the cells to a constant fraction of what it was in the unirradiated cells. (4) The rate of DNA synthesis is reduced to 37 % (1/ e ) by a dose of ca . 25 α/μ 2 or an X-ray dose of 14000 rads for mouse fibroblast cultures. In Hela cell cultures a dose of ca . 90000 rads is needed to reduce the rate of DNA synthesis to 37 % of the initial value. (5) The reduction in synthesis occurs not more than half an hour after irradiation and may be an immediate effect. From (4) above the target shape can be roughly calculated and if it is assumed to be cylindrical it appears to have dimensions 16 Å in one direction and 160000 Å in the other, i. e. a long thin thread with a mol. wt. of ca . 5 x 10 7 in the case of the mouse fibroblast experiments. In the case of the Hela cell experiments the target volume gives a mol. wt. of ca . 10 7 . These results are consistent with the view that the target may possibly be the DNA template (or maybe DNP because of the high value for the molecular weight in one case). If the effects described reflect damage to the DNA (or DNP ) template during the exponented phase of synthesis then observations, (1) (2), and (3) above follow as obvious corollaries.

Characterization of Single- and Multiple-Layer Films by X-Ray Reflectometry

1991 ◽  
Vol 35 (A) ◽  
pp. 137-142 ◽  
Author(s):  
T. C. Huang ◽  
W. Parrish
Keyword(s):  
Experimental Data ◽  
Thin Films ◽  
High Resolution ◽  
Single Layer ◽  
The Other ◽  
X Ray ◽  
Buried Interfaces ◽  
Multiple Layer ◽  
Reflectivity Data

AbstractPrecision X-ray reflectivity data were obtained with a high-resolution reflectometer equipped with a rotating anode X-ray source and Ge 220 channel monochromators (one placed before and the other after the specimen). The surfaces and buried interfaces of thin films were characterized by ieast-squares refinement of experimental data. Values of thickness, density, and/or roughness of Pt “single-layer” and Pt/Co based multiple-layer films were determined.

Study of Tribological Properties of Multilayer Ti/TiN Coating Containing Stress Absorbing Layers

2020 ◽  
Vol 142 (11) ◽  
Author(s):  
Amod Kashyap ◽  
A. P. Harsha ◽  
Harish C. Barshilia ◽  
Venkataramana Bonu ◽  
Praveen Kumar V. ◽  
...  
Keyword(s):  
Tribological Properties ◽  
Wear Behavior ◽  
Multilayer Coating ◽  
Considerable Change ◽  
Wear Volume ◽  
Significant Drop ◽  
X Ray ◽  
Paraffin Oil ◽  
The Coefficient Of Friction ◽  
Steel Balls

Abstract Titanium (Ti)/titanium nitride (TiN) ultrathin multilayer coating was deposited on 100Cr6 substrates to investigate the friction and wear behavior in the presence of paraffin oil as a lubricant. The coating architecture was designed by adding thick stress absorbing layers (SAL ∼320 nm) in between the ultrathin Ti/TiN (3.5/4 nm) multilayer structure. The SAL reduces the residual stress in the coating. The coating had a NaCl type of structure, and X-ray diffraction (XRD) results showed the preferential crystallographic orientation of TiN along [111] direction. The tribological properties of the nanostructured coating were evaluated under reciprocating sliding conditions at varying loads (2 and 7 N), and temperature (30 and 100 °C) against 100Cr6 steel balls using paraffin oil as a lubricant. There was no considerable change in the coefficient of friction (COF) at different testing parameters. However, there was a significant drop in wear volume at high-temperature testing conditions. The worn tracks were analyzed for their morphology and elemental composition through scanning electron microscope (SEM), energy dispersive X-ray analysis (EDAX), and Raman spectroscopy.

Single-layer MoS2formation by sulfidation of molybdenum oxides in different oxidation states on Au(111)

2017 ◽  
Vol 19 (21) ◽  
pp. 14020-14029 ◽  
Author(s):  
Norberto Salazar ◽  
Igor Beinik ◽  
Jeppe V. Lauritsen
Keyword(s):  
Scanning Tunneling Microscopy ◽  
Photoelectron Spectroscopy ◽  
Single Layer ◽  
Oxidation States ◽  
Scanning Tunneling ◽  
Molybdenum Oxides ◽  
Tunneling Microscopy ◽  
X Ray

The sulfidation pathway from MoO3to MoS2on Au(111) revealed by a combination of Scanning Tunneling Microscopy and X-Ray Photoelectron Spectroscopy.

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