Effects of absorber topography and multilayer coating defects on reflective masks for soft x-ray/EUV projection lithography

Author(s):  
Khanh B. Nguyen ◽  
Alfred K. K. Wong ◽  
Andrew R. Neureuther ◽  
David T. Attwood, Jr.
1993 ◽  
Vol 32 (34) ◽  
pp. 7044 ◽  
Author(s):  
K. Early ◽  
D. M. Tennant ◽  
D. Y. Jeon ◽  
P. P. Mulgrew ◽  
A. A. MacDowell ◽  
...  

Coatings ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 201
Author(s):  
Elisangela Aparecida dos Santos de Almeida ◽  
Julio Cesar Giubilei Milan ◽  
César Edil da Costa ◽  
Cristiano Binder ◽  
José Daniel Biasoli de Mello ◽  
...  

In cold rolling, a textured roll can be used to imprint a desired surface topography onto the sheet during rolling. This work proposes the use of diamond-like carbon (DLC) coatings to protect the surface topography of the rolls in replacement of the carcinogenic hard chrome. For that, hydrogenated amorphous carbon (a-C:H) was deposited on plasma nitrided tool steel, both for ground and textured specimens. Changes in surface topography due to DLC coating were assessed using a confocal microscope. Coating adhesion was evaluated using the method VDI 3198. The specimens were characterized using X-ray diffraction (XRD), microhardness test and scanning electron microscopy (SEM). The coating was characterized using Raman spectroscopy (RS) and X-ray photoelectron spectroscopy (XPS). The results showed a soft multilayer coating consisting of a plasma nitrided layer for load support, a Si-rich interlayer to improve adhesion and an a-C:H top layer. DLC deposition reduced the roughness of the textured specimens. The coating resulted in relatively stable friction and good durability, with small damage and negligible wear even under dry sliding.


2016 ◽  
Vol 87 (10) ◽  
pp. 104501 ◽  
Author(s):  
Danielle N. Gurgew ◽  
David M. Broadway ◽  
Mikhail Gubarev ◽  
Brian D. Ramsey ◽  
Don A. Gregory

1995 ◽  
Vol 27 (1-4) ◽  
pp. 317-320
Author(s):  
Hiroaki Oizumi ◽  
Masayuki Ohtani ◽  
Yoshio Yamashita ◽  
Katsuhiko Murakami ◽  
Hiroshi Nagata ◽  
...  

Author(s):  
W. T. Silfvast ◽  
M. C. Richardson ◽  
H. Bender ◽  
A. Hanzo ◽  
V. Yanovsky ◽  
...  

2020 ◽  
Vol 142 (11) ◽  
Author(s):  
Amod Kashyap ◽  
A. P. Harsha ◽  
Harish C. Barshilia ◽  
Venkataramana Bonu ◽  
Praveen Kumar V. ◽  
...  

Abstract Titanium (Ti)/titanium nitride (TiN) ultrathin multilayer coating was deposited on 100Cr6 substrates to investigate the friction and wear behavior in the presence of paraffin oil as a lubricant. The coating architecture was designed by adding thick stress absorbing layers (SAL ∼320 nm) in between the ultrathin Ti/TiN (3.5/4 nm) multilayer structure. The SAL reduces the residual stress in the coating. The coating had a NaCl type of structure, and X-ray diffraction (XRD) results showed the preferential crystallographic orientation of TiN along [111] direction. The tribological properties of the nanostructured coating were evaluated under reciprocating sliding conditions at varying loads (2 and 7 N), and temperature (30 and 100 °C) against 100Cr6 steel balls using paraffin oil as a lubricant. There was no considerable change in the coefficient of friction (COF) at different testing parameters. However, there was a significant drop in wear volume at high-temperature testing conditions. The worn tracks were analyzed for their morphology and elemental composition through scanning electron microscope (SEM), energy dispersive X-ray analysis (EDAX), and Raman spectroscopy.


1995 ◽  
Author(s):  
Masaaki Ito ◽  
Takashi Soga ◽  
Hiromasa Yamanashi ◽  
Taro Ogawa

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