Ion energy distributions in a pulsed dual frequency inductively coupled discharge of Ar/CF4 and effect of duty ratio

2015 ◽  
Vol 22 (8) ◽  
pp. 083514 ◽  
Author(s):  
Anurag Mishra ◽  
Jin Seok Seo ◽  
Tae Hyung Kim ◽  
Geun Young Yeom
Keyword(s):  
Duty Ratio ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions

The Influence of Ion Energy Distribution for Multiple Frequencies Driven

2013 ◽  
Vol 664 ◽  
pp. 947-953
Author(s):  
Zhu Wen Zhou ◽  
Yuan Sheng Wang ◽  
Bo Kong
Keyword(s):  
Integrated Circuit ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Low Frequencies ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Multiple Frequencies ◽  
Ion Energy Distributions ◽  
Capacitive Discharges ◽  
Good Agreement

The voltages, resonant waves and frequencies how to influence on the ion energy distributions (IEDs) from multiple frequencies driven in capacitive discharges, it is important to analyze these phenomenon and mechanism in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics. We focused on the function of the ion energy distributions under high and low frequencies (dual frequency) drive in capacitive discharges, we derived a model of computation of the multiple frequencies driven IEDs from analyzing theories. The model can analyze and predict the IEDs under different high and low frequencies driven, the results from the model are in good agreement with these important data from public publish.

scholarly journals Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

2012 ◽  
Vol 21 (6) ◽  
pp. 065009 ◽  
Author(s):  
Michael D Logue ◽  
Hyungjoo Shin ◽  
Weiye Zhu ◽  
Lin Xu ◽  
Vincent M Donnelly ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas

scholarly journals Factors influencing ion energy distributions in pulsed inductively coupled argon plasmas

2020 ◽  
Vol 53 (33) ◽  
pp. 335202
Author(s):  
Zhiying Chen ◽  
Roberto C Longo ◽  
Michael Hummel ◽  
Megan Carruth ◽  
Joel Blakeney ◽  
...  
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Argon Plasmas ◽  
Factors Influencing ◽  
Ion Energy Distributions
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