Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas

Martin Misakian; Eric Benck; Yicheng Wang

doi:10.1063/1.1311827

Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas

Journal of Applied Physics ◽

10.1063/1.1311827 ◽

2000 ◽

Vol 88 (8) ◽

pp. 4510 ◽

Cited By ~ 2

Author(s):

Martin Misakian ◽

Eric Benck ◽

Yicheng Wang

Keyword(s):

Radio Frequency ◽

Time Evolution ◽

Optical Emission ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Ion Energy Distributions

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Ion energy distributions in inductively coupled radio-frequency discharges in argon, nitrogen, oxygen, chlorine, and their mixtures

Journal of Applied Physics ◽

10.1063/1.370138 ◽

1999 ◽

Vol 85 (9) ◽

pp. 6358-6365 ◽

Cited By ~ 54

Author(s):

Yicheng Wang ◽

J. K. Olthoff

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

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Time evolution of ion energy distributions and optical emissions in pulsed radio frequency plasmas

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) ◽

10.1109/plasma.1999.829441 ◽

2003 ◽

Author(s):

M. Misakian ◽

E. Benck ◽

Y. Wang ◽

J. Olthoff ◽

J. Roberts

Keyword(s):

Radio Frequency ◽

Time Evolution ◽

Energy Distributions ◽

Ion Energy ◽

Optical Emissions ◽

Ion Energy Distributions

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Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively coupled, high-density plasma reactor

Journal of Applied Physics ◽

10.1063/1.370298 ◽

1999 ◽

Vol 85 (8) ◽

pp. 3966-3975 ◽

Cited By ~ 74

Author(s):

Mark A. Sobolewski ◽

James K. Olthoff ◽

Yicheng Wang

Keyword(s):

Radio Frequency ◽

Plasma Reactor ◽

High Density ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Ion Energy Distributions ◽

Density Plasma

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Collisional effect on the time evolution of ion energy distributions outside the sheath during the afterglow of pulsed inductively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/22/6/065008 ◽

2013 ◽

Vol 22 (6) ◽

pp. 065008 ◽

Cited By ~ 4

Author(s):

J B Lee ◽

H Y Chang ◽

S H Seo

Keyword(s):

Time Evolution ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Collisional Effect ◽

Ion Energy Distributions ◽

Coupled Plasmas

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Predictions of ion energy distributions and radical fluxes in radio frequency biased inductively coupled plasma etching reactors

Journal of Applied Physics ◽

10.1063/1.361152 ◽

1996 ◽

Vol 79 (5) ◽

pp. 2275-2286 ◽

Cited By ~ 69

Author(s):

Robert J. Hoekstra ◽

Mark J. Kushner

Keyword(s):

Radio Frequency ◽

Plasma Etching ◽

Inductively Coupled Plasma ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled Plasma Etching ◽

Inductively Coupled ◽

Ion Energy Distributions

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Effect of electrode material on measured ion energy distributions in radio‐frequency discharges

Applied Physics Letters ◽

10.1063/1.114540 ◽

1995 ◽

Vol 67 (4) ◽

pp. 473-475 ◽

Cited By ~ 18

Author(s):

J. K. Olthoff ◽

R. J. Van Brunt ◽

S. B. Radovanov

Keyword(s):

Radio Frequency ◽

Electrode Material ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

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Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

Journal of Applied Physics ◽

10.1063/1.372148 ◽

2000 ◽

Vol 87 (5) ◽

pp. 2114-2121 ◽

Cited By ~ 27

Author(s):

Yicheng Wang ◽

Eric C. Benck ◽

Martin Misakian ◽

Manabu Edamura ◽

James K. Olthoff

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Time Resolved ◽

Ion Energy ◽

Optical Emissions ◽

Radio Frequency Discharges ◽

Ion Energy Distributions ◽

Time Resolved Measurements

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Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/6/065009 ◽

2012 ◽

Vol 21 (6) ◽

pp. 065009 ◽

Cited By ~ 18

Author(s):

Michael D Logue ◽

Hyungjoo Shin ◽

Weiye Zhu ◽

Lin Xu ◽

Vincent M Donnelly ◽

...

Keyword(s):

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Ion Energy Distributions ◽

Coupled Plasmas

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Ion energy distributions in radio frequency discharges sustained in gas mixtures obtained using a Monte Carlo-fluid hybrid model: endothermic processes and ion holes

Plasma Sources Science and Technology ◽

10.1088/0963-0252/3/2/010 ◽

1994 ◽

Vol 3 (2) ◽

pp. 190-205 ◽

Cited By ~ 6

Author(s):

H H Hwang ◽

M J Kushner

Keyword(s):

Monte Carlo ◽

Radio Frequency ◽

Hybrid Model ◽

Gas Mixtures ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

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Effects of a chirped bias voltage on ion energy distributions in inductively coupled plasma reactors

Journal of Applied Physics ◽

10.1063/1.4993785 ◽

2017 ◽

Vol 122 (8) ◽

pp. 083301 ◽

Cited By ~ 1

Author(s):

Steven J. Lanham ◽

Mark J. Kushner

Keyword(s):

Bias Voltage ◽

Inductively Coupled Plasma ◽

Plasma Reactors ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Ion Energy Distributions

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