Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma

2008 ◽  
Vol 93 (3) ◽  
pp. 031504 ◽  
Author(s):  
Xiao-Song Li ◽  
Zhen-Hua Bi ◽  
Da-Lei Chang ◽  
Zhi-Cheng Li ◽  
Shuai Wang ◽  
...  
Keyword(s):  
Low Frequency ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Frequency Source ◽  
Capacitively Coupled Plasma ◽  
Ion Energy Distributions

Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/CF4 plasma

2010 ◽  
Vol 17 (3) ◽  
pp. 033501 ◽  
Author(s):  
Zhi-Cheng Li ◽  
Da-Lei Chang ◽  
Xiao-Song Li ◽  
Zhen-Hua Bi ◽  
Wen-Qi Lu ◽  
...  
Keyword(s):  
Experimental Investigation ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distributions

The Influence of Ion Energy Distribution for Multiple Frequencies Driven

2013 ◽  
Vol 664 ◽  
pp. 947-953
Author(s):  
Zhu Wen Zhou ◽  
Yuan Sheng Wang ◽  
Bo Kong
Keyword(s):  
Integrated Circuit ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Low Frequencies ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Multiple Frequencies ◽  
Ion Energy Distributions ◽  
Capacitive Discharges ◽  
Good Agreement

The voltages, resonant waves and frequencies how to influence on the ion energy distributions (IEDs) from multiple frequencies driven in capacitive discharges, it is important to analyze these phenomenon and mechanism in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics. We focused on the function of the ion energy distributions under high and low frequencies (dual frequency) drive in capacitive discharges, we derived a model of computation of the multiple frequencies driven IEDs from analyzing theories. The model can analyze and predict the IEDs under different high and low frequencies driven, the results from the model are in good agreement with these important data from public publish.

Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

2015 ◽  
Vol 117 (23) ◽  
pp. 233302 ◽  
Author(s):  
Yiting Zhang ◽  
Abdullah Zafar ◽  
David J. Coumou ◽  
Steven C. Shannon ◽  
Mark J. Kushner
Keyword(s):  
Phase Shifting ◽  
Energy Distributions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas
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