Generation of uniform large-area very high frequency plasmas by launching two specific standing waves simultaneously

2014 ◽  
Vol 116 (10) ◽  
pp. 103307 ◽  
Author(s):  
Hsin-Liang Chen ◽  
Yen-Cheng Tu ◽  
Cheng-Chang Hsieh ◽  
Deng-Lain Lin ◽  
Keh-Chyang Leou
Keyword(s):  
High Frequency ◽  
Standing Waves ◽  
Large Area ◽  
Very High Frequency ◽  
Very High

Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor

2004 ◽  
Vol 95 (9) ◽  
pp. 4559-4564 ◽  
Author(s):  
H. Schmidt ◽  
L. Sansonnens ◽  
A. A. Howling ◽  
Ch. Hollenstein ◽  
M. Elyaakoubi ◽  
...  
Keyword(s):  
High Frequency ◽  
Large Area ◽  
Very High Frequency ◽  
Very High

Experimental Investigation of very High Frequency Slot Antenna on M-60A-1 Tank

1977 ◽  
Author(s):  
D. V. Campbell ◽  
William Kennebeck ◽  
A. Zanella ◽  
Paul Sexton
Keyword(s):  
Experimental Investigation ◽  
High Frequency ◽  
Slot Antenna ◽  
Very High Frequency ◽  
Very High
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