Monte Carlo simulations of argon ion transport in the downstream region of electron cyclotron resonance plasmas

1998 ◽  
Vol 83 (10) ◽  
pp. 5069-5074 ◽  
Author(s):  
X. X. Zhong ◽  
J. D. Wu ◽  
C. Z. Wu ◽  
F. M. Li
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Simulations ◽  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Downstream Region ◽  
Argon Ion

Metastable chlorine ion transport in a diverging field electron cyclotron resonance plasma

1992 ◽  
Vol 72 (8) ◽  
pp. 3384-3393 ◽  
Author(s):  
Toshiki Nakano ◽  
Nader Sadeghi ◽  
Dennis J. Trevor ◽  
Richard A. Gottscho ◽  
R. W. Boswell
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Field Electron ◽  
Chlorine Ion ◽  
Resonance Plasma

Ion transport in an electron cyclotron resonance plasma

1991 ◽  
Vol 70 (5) ◽  
pp. 2552-2569 ◽  
Author(s):  
Nader Sadeghi ◽  
Toshiki Nakano ◽  
Dennis J. Trevor ◽  
Richard A. Gottscho
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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