Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge sustained by circular TM11mode fields

S. C. Kuo; S. P. Kuo

doi:10.1063/1.363033

Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge sustained by circular TM11mode fields

Journal of Applied Physics ◽

10.1063/1.363033 ◽

1996 ◽

Vol 80 (4) ◽

pp. 2512-2514 ◽

Cited By ~ 2

Author(s):

S. C. Kuo ◽

S. P. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Resonance Microwave

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Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge

International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1993.593406 ◽

1993 ◽

Author(s):

S.C. Kuo ◽

E.E. Kunhardt ◽

S.P. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Resonance Microwave

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Comparison of circular TM/sub 01/ and TM/sub 11/ modes generated electron cyclotron resonance microwave discharges-a Monte Carlo simulation study

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) ◽

10.1109/plasma.2000.854836 ◽

2002 ◽

Author(s):

S.S. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Simulation Study ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Monte Carlo Simulation Study ◽

Microwave Discharges ◽

Resonance Microwave

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Formation of CN x thin films by reactive pulsed laser deposition assisted by electron cyclotron resonance microwave discharge

Applied Physics A ◽

10.1007/s003390100806 ◽

2001 ◽

Vol 73 (5) ◽

pp. 605-608 ◽

Cited By ~ 8

Author(s):

W. Shi ◽

J.D. Wu ◽

J. Sun ◽

H. Ling ◽

Z.F. Ying ◽

...

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Pulsed Laser ◽

Electron Cyclotron ◽

Laser Deposition ◽

Resonance Microwave

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Electron Cyclotron Resonance Microwave Discharge for Oxide Deposition Using Tetraethoxysilane

Journal of The Electrochemical Society ◽

10.1149/1.2069315 ◽

1992 ◽

Vol 139 (3) ◽

pp. 850-856 ◽

Cited By ~ 16

Author(s):

C. S. Pai ◽

J. F. Miner ◽

P. D. Foo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Oxide Deposition ◽

Resonance Microwave

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Monte Carlo simulation and experimental study of an electron cyclotron resonance plasma for thin film deposition

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.604953 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo ◽

S.C. Kuo

Keyword(s):

Thin Film ◽

Experimental Study ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Plasma

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High excitation of the species in nitrogen–aluminum plasma generated by electron cyclotron resonance microwave discharge of N2 gas and pulsed laser ablation of Al target

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2014.09.007 ◽

2014 ◽

Vol 101 ◽

pp. 226-233 ◽

Cited By ~ 4

Author(s):

Peipei Liang ◽

Yanli Li ◽

Hua Cai ◽

Qinghu You ◽

Xu Yang ◽

...

Keyword(s):

Laser Ablation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Pulsed Laser ◽

Pulsed Laser Ablation ◽

Electron Cyclotron ◽

High Excitation ◽

Aluminum Plasma ◽

Resonance Microwave

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Electromagnetic particle simulation of electron cyclotron resonance microwave discharge

Journal of Applied Physics ◽

10.1063/1.352825 ◽

1993 ◽

Vol 73 (9) ◽

pp. 4205-4211 ◽

Cited By ~ 13

Author(s):

Wook Hee Koh ◽

Nak Heon Choi ◽

Duk In Choi ◽

Yong Ho Oh

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Particle Simulation ◽

Resonance Microwave

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Electron cyclotron resonance microwave discharge for oxide deposition using tetramethylcyclotetrasiloxane

Journal of Applied Physics ◽

10.1063/1.354074 ◽

1993 ◽

Vol 73 (7) ◽

pp. 3531-3538 ◽

Cited By ~ 6

Author(s):

C. S. Pai ◽

J. F. Miner ◽

P. D. Foo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Oxide Deposition ◽

Resonance Microwave

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Monte Carlo simulation and experimental study of an electron cyclotron resonance plasma for thin film deposition

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1996.550637 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo ◽

S.C. Kuo

Keyword(s):

Thin Film ◽

Experimental Study ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Plasma

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Monte Carlo simulation of electron behavior in an electron cyclotron resonance discharge

Journal of Applied Physics ◽

10.1063/1.352824 ◽

1993 ◽

Vol 73 (9) ◽

pp. 4197-4204 ◽

Cited By ~ 11

Author(s):

S. C. Kuo ◽

E. E. Kunhardt ◽

S. P. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

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