scholarly journals The particle-in-cell simulation and Monte Carlo collision simulation of the interaction between electrons and microwave in electron cyclotron resonance discharge

2009 ◽  
Vol 58 (8) ◽  
pp. 5526
Author(s):  
Jin Xiao-Lin ◽  
Huang Tao ◽  
Liao Ping ◽  
Yang Zhong-Hai
Keyword(s):  
Monte Carlo ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Particle In Cell ◽  
Cell Simulation

A two‐dimensional particle‐in‐cell simulation of an electron‐cyclotron‐resonance etching tool

1995 ◽  
Vol 78 (4) ◽  
pp. 2270-2278 ◽  
Author(s):  
K. A. Ashtiani ◽  
J. L. Shohet ◽  
W. N. G. Hitchon ◽  
G.‐H. Kim ◽  
N. Hershkowitz
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Two Dimensional ◽  
Particle In Cell ◽  
Cell Simulation

3D particle-in-cell simulations of electron magnetic confinement in electron cyclotron resonance ion sources

2020 ◽  
Vol 91 (1) ◽  
pp. 013302
Author(s):  
Xiaolin Jin ◽  
Li Lei ◽  
Jibo Li ◽  
Tao Huang ◽  
Xiaoyan Zhang ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Magnetic Confinement ◽  
Electron Cyclotron ◽  
Ion Sources ◽  
Particle In Cell
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