Control of Radial Potential Profile and Nonambipolar ion Transport in an Electron Cyclotron Resonance Mirror Plasma

1986 ◽  
Vol 56 (17) ◽  
pp. 1815-1818 ◽  
Author(s):  
A. Tsushima ◽  
T. Mieno ◽  
M. Oertl ◽  
R. Hatakeyama ◽  
N. Sato
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Potential Profile ◽  
Radial Potential

Metastable chlorine ion transport in a diverging field electron cyclotron resonance plasma

1992 ◽  
Vol 72 (8) ◽  
pp. 3384-3393 ◽  
Author(s):  
Toshiki Nakano ◽  
Nader Sadeghi ◽  
Dennis J. Trevor ◽  
Richard A. Gottscho ◽  
R. W. Boswell
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Field Electron ◽  
Chlorine Ion ◽  
Resonance Plasma

Ion transport in an electron cyclotron resonance plasma

1991 ◽  
Vol 70 (5) ◽  
pp. 2552-2569 ◽  
Author(s):  
Nader Sadeghi ◽  
Toshiki Nakano ◽  
Dennis J. Trevor ◽  
Richard A. Gottscho
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

scholarly journals Simulation of ion transport in an extended electron cyclotron resonance plasma

2000 ◽  
Vol 87 (3) ◽  
pp. 1070-1075 ◽  
Author(s):  
Minghai Liu ◽  
Xiwei Hu ◽  
Hanming Wu ◽  
Qinchong Wu ◽  
Guoyang Yu ◽  
...  
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

1994 ◽  
Vol 30 (1) ◽  
pp. 84-85 ◽  
Author(s):  
R.J. Shul ◽  
D.J. Rieger ◽  
C. Constantine ◽  
A.G. Baca ◽  
C. Barratt
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron
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