Metastable chlorine ion transport in a diverging field electron cyclotron resonance plasma

1992 ◽  
Vol 72 (8) ◽  
pp. 3384-3393 ◽  
Author(s):  
Toshiki Nakano ◽  
Nader Sadeghi ◽  
Dennis J. Trevor ◽  
Richard A. Gottscho ◽  
R. W. Boswell
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Field Electron ◽  
Chlorine Ion ◽  
Resonance Plasma

Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor

1990 ◽  
Vol 57 (12) ◽  
pp. 1188-1190 ◽  
Author(s):  
Dennis J. Trevor ◽  
Nader Sadeghi ◽  
Toshiki Nakano ◽  
Jacques Derouard ◽  
Richard A. Gottscho ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Reactor ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Spatially Resolved ◽  
Field Electron ◽  
Ion Velocity ◽  
Resonance Plasma

Ion transport in an electron cyclotron resonance plasma

1991 ◽  
Vol 70 (5) ◽  
pp. 2552-2569 ◽  
Author(s):  
Nader Sadeghi ◽  
Toshiki Nakano ◽  
Dennis J. Trevor ◽  
Richard A. Gottscho
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

scholarly journals Simulation of ion transport in an extended electron cyclotron resonance plasma

2000 ◽  
Vol 87 (3) ◽  
pp. 1070-1075 ◽  
Author(s):  
Minghai Liu ◽  
Xiwei Hu ◽  
Hanming Wu ◽  
Qinchong Wu ◽  
Guoyang Yu ◽  
...  
Keyword(s):  
Ion Transport ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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