Self‐consistent stochastic electron heating in radio frequency discharges

1988 ◽  
Vol 64 (9) ◽  
pp. 4375-4383 ◽  
Author(s):  
C. G. Goedde ◽  
A. J. Lichtenberg ◽  
M. A. Lieberman
Keyword(s):  
Radio Frequency ◽  
Electron Heating ◽  
Self Consistent ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Self‐consistent fluid modeling of radio frequency discharges in two dimensions

1993 ◽  
Vol 62 (24) ◽  
pp. 3207-3209 ◽  
Author(s):  
M. Dalvie ◽  
M. Surendra ◽  
G. S. Selwyn
Keyword(s):  
Radio Frequency ◽  
Two Dimensions ◽  
Fluid Modeling ◽  
Self Consistent ◽  
Radio Frequency Discharges

scholarly journals Electron heating by sheaths in radio frequency discharges

1992 ◽  
Vol 71 (10) ◽  
pp. 4718-4726 ◽  
Author(s):  
A. E. Wendt ◽  
W. N. G. Hitchon
Keyword(s):  
Radio Frequency ◽  
Electron Heating ◽  
Radio Frequency Discharges

Observation of Ω mode electron heating in dusty argon radio frequency discharges

2013 ◽  
Vol 20 (8) ◽  
pp. 083704 ◽  
Author(s):  
Carsten Killer ◽  
Gunnar Bandelow ◽  
Konstantin Matyash ◽  
Ralf Schneider ◽  
André Melzer
Keyword(s):  
Radio Frequency ◽  
Electron Heating ◽  
Radio Frequency Discharges
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