Self‐consistent fluid modeling of radio frequency discharges in two dimensions

1993 ◽  
Vol 62 (24) ◽  
pp. 3207-3209 ◽  
Author(s):  
M. Dalvie ◽  
M. Surendra ◽  
G. S. Selwyn
Keyword(s):  
Radio Frequency ◽  
Two Dimensions ◽  
Fluid Modeling ◽  
Self Consistent ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Self‐consistent stochastic electron heating in radio frequency discharges

1988 ◽  
Vol 64 (9) ◽  
pp. 4375-4383 ◽  
Author(s):  
C. G. Goedde ◽  
A. J. Lichtenberg ◽  
M. A. Lieberman
Keyword(s):  
Radio Frequency ◽  
Electron Heating ◽  
Self Consistent ◽  
Radio Frequency Discharges

Excitation in radio-frequency discharges

1963 ◽  
Vol 19 (8) ◽  
pp. 1309-1317 ◽  
Author(s):  
R. Mavrodineanu ◽  
R.C. Hughes
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

Modeling of electronegative radio-frequency discharges

1991 ◽  
Vol 19 (2) ◽  
pp. 122-129 ◽  
Author(s):  
M. Meyyappan ◽  
T.R. Govindan
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

Radio-frequency sheaths physics: Experimental characterization on Tore Supra and related self-consistent modeling

2014 ◽  
Vol 21 (6) ◽  
pp. 061509 ◽  
Author(s):  
Jonathan Jacquot ◽  
Daniele Milanesio ◽  
Laurent Colas ◽  
Yann Corre ◽  
Marc Goniche ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Experimental Characterization ◽  
Self Consistent

scholarly journals Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms

2019 ◽  
Vol 126 (4) ◽  
pp. 043303 ◽  
Author(s):  
A. Derzsi ◽  
B. Horváth ◽  
I. Korolov ◽  
Z. Donkó ◽  
J. Schulze
Keyword(s):  
Radio Frequency ◽  
Heavy Particle ◽  
Secondary Electrons ◽  
Radio Frequency Discharges
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