Carbon doping and growth rate reduction by CCl4during metalorganic chemical‐vapor deposition of GaAs

1994 ◽  
Vol 76 (9) ◽  
pp. 5079-5084 ◽  
Author(s):  
Jeong‐Seok Lee ◽  
In Kim ◽  
Byung‐Doo Choe ◽  
Weon Guk Jeong
Keyword(s):  
Growth Rate ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Doping ◽  
Rate Reduction ◽  
Growth Rate Reduction ◽  
Metalorganic Chemical

Optical Quality Dependence on Growth Rate for Metalorganic Chemical Vapor Deposition Grown GaInNAs/GaAs

2000 ◽  
Vol 39 (Part 2, No. 12A) ◽  
pp. L1219-L1220 ◽  
Author(s):  
Masao Kawaguchi ◽  
Tomoyuki Miyamoto ◽  
Eric Gouardes ◽  
Dietmar Schlenker ◽  
Takashi Kondo ◽  
...  
Keyword(s):  
Growth Rate ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Optical Quality ◽  
Metalorganic Chemical

Cation Source Dependence of $\bf Ga_{0.5}In_{0.5}P$ Growth Rate by Low-Pressure Metalorganic Chemical Vapor Deposition

1994 ◽  
Vol 33 (Part 2, No. 6B) ◽  
pp. L832-L833
Author(s):  
Janne-Wha Wu ◽  
Chun-Yen Chang ◽  
Kun-Chuan Lin ◽  
Shih-Hsiung Chan ◽  
Horng-Dar Chen ◽  
...  
Keyword(s):  
Growth Rate ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Metalorganic Chemical

Heavy carbon doping of metalorganic chemical vapor deposition grown GaAs using carbon tetrachloride

1989 ◽  
Vol 54 (19) ◽  
pp. 1905-1907 ◽  
Author(s):  
B. T. Cunningham ◽  
M. A. Haase ◽  
M. J. McCollum ◽  
J. E. Baker ◽  
G. E. Stillman
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Tetrachloride ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Doping ◽  
Heavy Carbon ◽  
Metalorganic Chemical

The growth rate of CdxHg1−xTe grown by metalorganic chemical vapor deposition

1992 ◽  
Vol 117 (1-4) ◽  
pp. 44-48 ◽  
Author(s):  
H. Takada ◽  
T. Murakami ◽  
M. Suita ◽  
K. Yasumura ◽  
Y. Endo ◽  
...  
Keyword(s):  
Growth Rate ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Metalorganic Chemical
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