Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Yoshihiro Okuno; Yasunori Ohtsu; Chihiro Komatsu; Hiroharu Fujita

doi:10.1063/1.353193

Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Journal of Applied Physics ◽

10.1063/1.353193 ◽

1993 ◽

Vol 73 (4) ◽

pp. 1612-1616 ◽

Cited By ~ 15

Author(s):

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Chihiro Komatsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

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Measurement of the electron energy distribution function in an argon radio-frequency discharge in the γ mode

Applied Physics Letters ◽

10.1063/1.123716 ◽

1999 ◽

Vol 74 (14) ◽

pp. 1969-1971 ◽

Cited By ~ 11

Author(s):

C. M. Deegan ◽

J. P. Goss ◽

D. Vender ◽

M. B. Hopkins

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

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Investigation of the Electron Energy Distribution Function in Capacitively Coupled (13.56 MHz) Radio Frequency Discharge in Dry Air

Rafidain Journal of Science ◽

10.33899/rjs.2013.80284 ◽

2013 ◽

Vol 24 (11) ◽

pp. 82-95

Author(s):

Haitham A. Al-Rawachy ◽

Heba T. Al-Saoor

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Dry Air ◽

Radio Frequency Discharge

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Influence of diffusion of the electron energy distribution function in a low-temperature microwave discharge plasma

Radiophysics and Quantum Electronics ◽

10.1007/bf01039676 ◽

1989 ◽

Vol 32 (2) ◽

pp. 184-189

Author(s):

N. A. Dyatko ◽

I. V. Kochetov ◽

A. P. Napartovich

Keyword(s):

Distribution Function ◽

Low Temperature ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Microwave Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Electron energy distribution function in He‐CO radio‐frequency plasmas: The role of vibrational and electronic superelastic collisions

Journal of Applied Physics ◽

10.1063/1.339075 ◽

1987 ◽

Vol 62 (11) ◽

pp. 4398-4403 ◽

Cited By ~ 27

Author(s):

M. Capitelli ◽

R. Celiberto ◽

C. Gorse ◽

R. Winkler ◽

J. Wilhelm

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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On the Question of Increasing Maxwellization of the Electron Energy Distribution Function due to Electron — Electron Interaction with Growing Ionization Degree in the Beam Discharge Plasma

Beiträge aus der Plasmaphysik ◽

10.1002/ctpp.19830230303 ◽

1983 ◽

Vol 23 (3) ◽

pp. 219-228 ◽

Cited By ~ 2

Author(s):

R. Winkler ◽

J. Wilhelm

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Interaction ◽

Electron Energy Distribution ◽

Ionization Degree

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Measurement of Electron Energy Distribution Function in a Low-Pressure rf Discharge Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.1503 ◽

1992 ◽

Vol 31 (Part 1, No. 5A) ◽

pp. 1503-1504 ◽

Cited By ~ 4

Author(s):

Shinya Yagura ◽

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Low Pressure ◽

Energy Distribution Function ◽

Rf Discharge ◽

Electron Energy Distribution

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Langmuir probe measurements of the electron energy distribution function in radio‐frequency plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578228 ◽

1992 ◽

Vol 10 (4) ◽

pp. 1207-1211 ◽

Cited By ~ 31

Author(s):

John V. Scanlan ◽

Michael B. Hopkins

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Langmuir Probe Measurements ◽

Probe Measurements

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Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

Applied Physics Letters ◽

10.1063/1.109265 ◽

1993 ◽

Vol 62 (21) ◽

pp. 2622-2624 ◽

Cited By ~ 86

Author(s):

Michael S. Barnes ◽

John C. Forster ◽

John H. Keller

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Glow Discharge

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Electron energy distribution function in a Hall discharge plasma

10.2514/6.2001-3326 ◽

2001 ◽

Author(s):

N. Meezan ◽

M. Cappelli

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Variations in the electron energy distribution function in discharge plasma of a unipolar gas breakdown

Moscow University Physics Bulletin ◽

10.3103/s0027134909050130 ◽

2009 ◽

Vol 64 (5) ◽

pp. 532-535 ◽

Cited By ~ 1

Author(s):

V. P. Savinov ◽

A. K. Sukhov ◽

T. P. Kopeikina

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Gas Breakdown

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