Langmuir probe measurements of the electron energy distribution function in radio‐frequency plasmas

John V. Scanlan; Michael B. Hopkins

doi:10.1116/1.578228

Langmuir probe measurements of the electron energy distribution function in radio‐frequency plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578228 ◽

1992 ◽

Vol 10 (4) ◽

pp. 1207-1211 ◽

Cited By ~ 31

Author(s):

John V. Scanlan ◽

Michael B. Hopkins

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Langmuir Probe Measurements ◽

Probe Measurements

Download Full-text

Langmuir probe measurements of the electron energy distribution function in magnetized gas discharge plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/2/025004 ◽

2012 ◽

Vol 21 (2) ◽

pp. 025004 ◽

Cited By ~ 34

Author(s):

Tsv K Popov ◽

P Ivanova ◽

M Dimitrova ◽

J Kovačič ◽

T Gyergyek ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Discharge Plasmas ◽

Langmuir Probe Measurements ◽

Probe Measurements

Download Full-text

Hot Langmuir probe measurements in a chemically reactive plasma and accurate evaluation of the electron energy distribution function

Vacuum ◽

10.1016/s0042-207x(98)00139-0 ◽

1998 ◽

Vol 51 (2) ◽

pp. 89-97 ◽

Cited By ~ 15

Author(s):

Ts Popov ◽

I Petkov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Accurate Evaluation ◽

Reactive Plasma ◽

Langmuir Probe Measurements ◽

Probe Measurements

Download Full-text

Emissive probe measurements of electron energy distribution function in radio-frequency plasma

IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science ◽

10.1109/plasma.2005.359477 ◽

2005 ◽

Author(s):

H. Shindo ◽

T. Ozawa ◽

T. Fukasawa

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Frequency Plasma ◽

Probe Measurements

Download Full-text

The New Langmuir Probe Analysis Algorithm Based on Wavelet Transforms to Obtain Electron Energy Distribution Function of Bi-Maxwellian Plasma

Journal of the Korean Physical Society ◽

10.3938/jkps.55.1825 ◽

2009 ◽

Vol 55 (5(1)) ◽

pp. 1825-1835 ◽

Cited By ~ 2

Author(s):

Jae-Myung Choe ◽

Gon-Ho Kim ◽

Dai-Gyoung Kim

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Wavelet Transforms ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Analysis Algorithm ◽

Maxwellian Plasma

Download Full-text

Iterative method of evaluating the electron energy distribution function from probe measurements under collisional conditions

Vacuum ◽

10.1016/s0042-207x(02)00325-1 ◽

2002 ◽

Vol 69 (1-3) ◽

pp. 159-163 ◽

Cited By ~ 9

Author(s):

F.M Dias ◽

Tsv.K Popov

Keyword(s):

Distribution Function ◽

Iterative Method ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Probe Measurements

Download Full-text

Determination of Electron Energy Distribution Function of Plasmas by Digital Processing from Langmuir Probe Characteristic

Japanese Journal of Applied Physics ◽

10.1143/jjap.29.2139 ◽

1990 ◽

Vol 29 (Part 1, No. 10) ◽

pp. 2139-2144 ◽

Cited By ~ 40

Author(s):

Fumiyuki Fujita ◽

Hatsuo Yamazaki

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Digital Processing ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Probe Characteristic

Download Full-text

Measurement of the electron energy distribution function by a Langmuir probe in an ITER-like hydrogen negative ion source

Nuclear Fusion ◽

10.1088/0029-5515/46/6/s11 ◽

2006 ◽

Vol 46 (6) ◽

pp. S307-S312 ◽

Cited By ~ 9

Author(s):

B Crowley ◽

D Homfray ◽

S.J Cox ◽

D Boilson ◽

H.P.L. de Esch ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Ion Source ◽

Energy Distribution Function ◽

Negative Ion ◽

Electron Energy Distribution

Download Full-text

Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Journal of Applied Physics ◽

10.1063/1.353193 ◽

1993 ◽

Vol 73 (4) ◽

pp. 1612-1616 ◽

Cited By ~ 15

Author(s):

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Chihiro Komatsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

Download Full-text

The langmuir probe influence on the measurement of the electron energy distribution function in O2 plasma

Czechoslovak Journal of Physics ◽

10.1007/bf01596011 ◽

1978 ◽

Vol 28 (9) ◽

pp. 985-988 ◽

Cited By ~ 3

Author(s):

B. Králiková ◽

J. Skála

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

O2 Plasma

Download Full-text

Electron energy distribution function in He‐CO radio‐frequency plasmas: The role of vibrational and electronic superelastic collisions

Journal of Applied Physics ◽

10.1063/1.339075 ◽

1987 ◽

Vol 62 (11) ◽

pp. 4398-4403 ◽

Cited By ~ 27

Author(s):

M. Capitelli ◽

R. Celiberto ◽

C. Gorse ◽

R. Winkler ◽

J. Wilhelm

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

Download Full-text