Measurement of the electron energy distribution function in an argon radio-frequency discharge in the γ mode
1992 ◽
Vol 10
(4)
◽
pp. 1207-1211
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1977 ◽
Vol 27
(9)
◽
pp. 1027-1033
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1985 ◽
Vol 18
(3)
◽
pp. 347-358
◽
2003 ◽
Vol 42
(Part 1, No. 2A)
◽
pp. 657-662
◽