Measurement of the electron energy distribution function in an argon radio-frequency discharge in the γ mode

1999 ◽  
Vol 74 (14) ◽  
pp. 1969-1971 ◽  
Author(s):  
C. M. Deegan ◽  
J. P. Goss ◽  
D. Vender ◽  
M. B. Hopkins
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

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