Electron energy distribution function in He‐CO radio‐frequency plasmas: The role of vibrational and electronic superelastic collisions

M. Capitelli; R. Celiberto; C. Gorse; R. Winkler; J. Wilhelm

doi:10.1063/1.339075

Electron energy distribution function in He‐CO radio‐frequency plasmas: The role of vibrational and electronic superelastic collisions

Journal of Applied Physics ◽

10.1063/1.339075 ◽

1987 ◽

Vol 62 (11) ◽

pp. 4398-4403 ◽

Cited By ~ 27

Author(s):

M. Capitelli ◽

R. Celiberto ◽

C. Gorse ◽

R. Winkler ◽

J. Wilhelm

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Journal of Applied Physics ◽

10.1063/1.353193 ◽

1993 ◽

Vol 73 (4) ◽

pp. 1612-1616 ◽

Cited By ~ 15

Author(s):

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Chihiro Komatsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

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Maxwell and non-Maxwell behavior of electron energy distribution function under expanding plasma jet conditions: The role of electron-electron, electron-ion, and superelastic electronic collisions under stationary and time-dependent conditions

Physical Review E ◽

10.1103/physreve.54.1843 ◽

1996 ◽

Vol 54 (2) ◽

pp. 1843-1849 ◽

Cited By ~ 25

Author(s):

M. Capitelli ◽

G. Colonna ◽

A. Gicquel ◽

C. Gorse ◽

K. Hassouni ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Plasma Jet ◽

Time Dependent ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Electron energy distribution function of capacitive coupled electronegative plasma: The role of flow rate of electronegative gas in Ar

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012422 ◽

2014 ◽

Author(s):

Y. Xin ◽

B. S. Hong ◽

D. S. Xu ◽

Y.Q. Yu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Flow Rate ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Electronegative Plasma

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Electron energy distribution function in helium discharges: The role of superelastic collisions from He(3S)

Physics Letters A ◽

10.1016/0375-9601(88)90761-x ◽

1988 ◽

Vol 126 (4) ◽

pp. 277-279 ◽

Cited By ~ 11

Author(s):

C. Gorse ◽

J. Bretagne ◽

M. Capitelli

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Langmuir probe measurements of the electron energy distribution function in radio‐frequency plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578228 ◽

1992 ◽

Vol 10 (4) ◽

pp. 1207-1211 ◽

Cited By ~ 31

Author(s):

John V. Scanlan ◽

Michael B. Hopkins

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Langmuir Probe Measurements ◽

Probe Measurements

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Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

Applied Physics Letters ◽

10.1063/1.109265 ◽

1993 ◽

Vol 62 (21) ◽

pp. 2622-2624 ◽

Cited By ~ 86

Author(s):

Michael S. Barnes ◽

John C. Forster ◽

John H. Keller

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Glow Discharge

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Emissive probe measurements of electron energy distribution function in radio-frequency plasma

IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science ◽

10.1109/plasma.2005.359477 ◽

2005 ◽

Author(s):

H. Shindo ◽

T. Ozawa ◽

T. Fukasawa

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Frequency Plasma ◽

Probe Measurements

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Measurement of the electron energy distribution function in an argon radio-frequency discharge in the γ mode

Applied Physics Letters ◽

10.1063/1.123716 ◽

1999 ◽

Vol 74 (14) ◽

pp. 1969-1971 ◽

Cited By ~ 11

Author(s):

C. M. Deegan ◽

J. P. Goss ◽

D. Vender ◽

M. B. Hopkins

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

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Investigation of the Electron Energy Distribution Function in Capacitively Coupled (13.56 MHz) Radio Frequency Discharge in Dry Air

Rafidain Journal of Science ◽

10.33899/rjs.2013.80284 ◽

2013 ◽

Vol 24 (11) ◽

pp. 82-95

Author(s):

Haitham A. Al-Rawachy ◽

Heba T. Al-Saoor

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Dry Air ◽

Radio Frequency Discharge

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Apparatus for the electron energy distribution function measurement in the afterglow discharge

Czechoslovak Journal of Physics ◽

10.1007/bf01589560 ◽

1977 ◽

Vol 27 (9) ◽

pp. 1027-1033 ◽

Cited By ~ 1

Author(s):

M. Tichý

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Function Measurement

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