Modeling of dopant diffusion in silicon: An effective diffusivity approach including point‐defect couplings
1988 ◽
Vol 7
(2)
◽
pp. 181-190
◽
1995 ◽
Vol 53
◽
pp. 466-467
Keyword(s):
1985 ◽
Vol 43
◽
pp. 350-351