Interface state densities for metal‐nitride‐oxide‐silicon devices

1990 ◽  
Vol 68 (8) ◽  
pp. 4172-4177 ◽  
Author(s):  
Dan Xu ◽  
Vik J. Kapoor
1973 ◽  
Vol 9 (11) ◽  
pp. 252-253 ◽  
Author(s):  
P.J.T. Mellor ◽  
P.J. Dunn
Keyword(s):  

1999 ◽  
Vol 592 ◽  
Author(s):  
T. Hattori ◽  
H. Nohira ◽  
Y Teramoto ◽  
N. Watanabe

ABSTRACTThe interface state densities near the midgap were measured with the progress of oxidation of atomically flat Si(100) surface. It was found that the interface state distribution in Si bandgap changes periodically with the progress of oxidation. Namely, the interface-state density near the midgap of Si exhibits drastic decrease at oxide film thickness where the surface roughness of oxide film takes its minimum value, while that does not exhibit decrease at the oxide film thickness where the surface roughness takes its maximum value. In order to minimize interface state densities the oxide film thickness should be precisely controlled to within an accuracy of 0.02 nm.


2021 ◽  
Vol 130 (13) ◽  
pp. 134501
Author(s):  
James P. Ashton ◽  
Stephen J. Moxim ◽  
Ashton D. Purcell ◽  
Patrick M. Lenahan ◽  
Jason T. Ryan

2020 ◽  
Vol 117 (10) ◽  
pp. 102102 ◽  
Author(s):  
Yuto Ando ◽  
Kentaro Nagamatsu ◽  
Manato Deki ◽  
Noriyuki Taoka ◽  
Atsushi Tanaka ◽  
...  

2019 ◽  
Vol 29 (49) ◽  
pp. 1904465 ◽  
Author(s):  
Nan Fang ◽  
Satoshi Toyoda ◽  
Takashi Taniguchi ◽  
Kenji Watanabe ◽  
Kosuke Nagashio

Sign in / Sign up

Export Citation Format

Share Document