Production of high brightness H− beams in surface plasma sources

1984 ◽  
Author(s):  
G. E. Derevyankin ◽  
V. G. Dudnikov
Keyword(s):  
Surface Plasma ◽  
High Brightness ◽  
Plasma Sources

H- production in pure hydrogen discharges of surface-plasma sources

1988 ◽  
Vol 23 (12) ◽  
pp. 1889-1892 ◽  
Author(s):  
Yu. I. Belchenko ◽  
A.S. Kupriyanov
Keyword(s):  
Pure Hydrogen ◽  
Surface Plasma ◽  
Plasma Sources

Compact surface plasma sources for heavy negative ion production

2004 ◽  
Vol 75 (5) ◽  
pp. 1732-1734 ◽  
Author(s):  
Vadim Dudnikov ◽  
J. Paul Farrell
Keyword(s):  
Compact Surface ◽  
Negative Ion ◽  
Surface Plasma ◽  
Plasma Sources ◽  
Ion Production

Surface plasma source to generate high‐brightness H− beams for ion projection lithographya)

1996 ◽  
Vol 67 (4) ◽  
pp. 1614-1617 ◽  
Author(s):  
V. G. Dudnikov ◽  
G. E. Derevyankin ◽  
D. V. Kovalevsky ◽  
V. Ya. Savkin ◽  
E. A. Sokolovsky ◽  
...  
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
High Brightness

scholarly journals Features of radio frequency surface plasma sources with a solenoidal magnetic field

2017 ◽  
Author(s):  
V. Dudnikov ◽  
R. P. Johnson ◽  
B. Han ◽  
S. Murray ◽  
T. Pennisi ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Radio Frequency ◽  
Surface Plasma ◽  
Plasma Sources

Surface Plasma Sources with Helicon Plasma Generators

2007 ◽  
Author(s):  
Vadim Dudnikov ◽  
Galina Dudnikova ◽  
J. Paul Farrell
Keyword(s):  
Surface Plasma ◽  
Helicon Plasma ◽  
Plasma Sources ◽  
Plasma Generators

Surface plasma source to generate high‐brightness H− beams for ion projection lithography (abstract)a)

1996 ◽  
Vol 67 (3) ◽  
pp. 927-927 ◽  
Author(s):  
V. G. Dudnikov ◽  
G. E. Derevyankin ◽  
D. V. Kovalevsky ◽  
V. Ya. Savkin ◽  
E. A. Sokolovsky ◽  
...  
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
High Brightness ◽  
Projection Lithography ◽  
Ion Projection Lithography
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