Surface Plasma Sources with Helicon Plasma Generators
1988 ◽
Vol 23
(12)
◽
pp. 1889-1892
◽
1996 ◽
Vol 24
(1)
◽
pp. 152-160
◽
2004 ◽
Vol 75
(5)
◽
pp. 1732-1734
◽
Keyword(s):
1996 ◽