Surface plasma source to generate high‐brightness H− beams for ion projection lithographya)

1996 ◽  
Vol 67 (4) ◽  
pp. 1614-1617 ◽  
Author(s):  
V. G. Dudnikov ◽  
G. E. Derevyankin ◽  
D. V. Kovalevsky ◽  
V. Ya. Savkin ◽  
E. A. Sokolovsky ◽  
...  
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
High Brightness

Surface plasma source to generate high‐brightness H− beams for ion projection lithography (abstract)a)

1996 ◽  
Vol 67 (3) ◽  
pp. 927-927 ◽  
Author(s):  
V. G. Dudnikov ◽  
G. E. Derevyankin ◽  
D. V. Kovalevsky ◽  
V. Ya. Savkin ◽  
E. A. Sokolovsky ◽  
...  
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
High Brightness ◽  
Projection Lithography ◽  
Ion Projection Lithography

SURFACE PLASMA SOURCE OF HYDROGEN ATOMS WITH AN ENERGY OF HUNDREDS eV

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-479-C7-480 ◽  
Author(s):  
V. G. Dudnikov ◽  
G. I. Fiksel'
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
Hydrogen Atoms

Evaluation of a simple method for chopping Penning surface-plasma source H− beams

1996 ◽  
Author(s):  
H. Vernon Smith ◽  
Paul Allison ◽  
J. David Schneider ◽  
James E. Stelzer ◽  
Ralph R. Stevens
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
Simple Method

The 25 mA continuous-wave surface-plasma source of H− ions

2014 ◽  
Vol 85 (2) ◽  
pp. 02B108 ◽  
Author(s):  
Yu. Belchenko ◽  
A. Gorbovsky ◽  
A. Sanin ◽  
V. Savkin
Keyword(s):  
Continuous Wave ◽  
Plasma Source ◽  
Wave Surface ◽  
Surface Plasma

Study of Fluctuations in the CW Penning Surface-Plasma Source of Negative Ions

2011 ◽  
Author(s):  
Yuri Belchenko ◽  
Andrey Sanin ◽  
Valery Savkin ◽  
Yasuhiko Takeiri ◽  
Katsuyoshi Tsumori
Keyword(s):  
Negative Ions ◽  
Plasma Source ◽  
Surface Plasma
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