Practical aspects of surface plasma sources operation
1988 ◽
Vol 23
(12)
◽
pp. 1889-1892
◽
2004 ◽
Vol 75
(5)
◽
pp. 1732-1734
◽
1988 ◽
Vol 23
(12)
◽
pp. 1885-1888
◽
1982 ◽
Vol 53
(4)
◽
pp. 405-408
◽