The energy distribution of ions bombarding electrode surfaces in rf plasma reactors

1989 ◽  
Vol 65 (3) ◽  
pp. 993-998 ◽  
Author(s):  
A. Metze ◽  
D. W. Ernie ◽  
H. J. Oskam
Keyword(s):  
Energy Distribution ◽  
Rf Plasma ◽  
Plasma Reactors ◽  
Electrode Surfaces ◽  
Rf Plasma Reactors

Mass spectrometric and optical emission diagnostics for rf plasma reactors

1992 ◽  
Author(s):  
James K. Olthoff ◽  
James R. Roberts ◽  
R. J. Van Brunt ◽  
James R. Whetstone ◽  
Mark A. Sobolewski ◽  
...  
Keyword(s):  
Optical Emission ◽  
Mass Spectrometric ◽  
Rf Plasma ◽  
Plasma Reactors ◽  
Rf Plasma Reactors

Application of the physics of plasma sheaths to the modeling of rf plasma reactors

1986 ◽  
Vol 60 (9) ◽  
pp. 3081-3087 ◽  
Author(s):  
A. Metze ◽  
D. W. Ernie ◽  
H. J. Oskam
Keyword(s):  
Rf Plasma ◽  
Plasma Reactors ◽  
Plasma Sheaths ◽  
Rf Plasma Reactors

Fine Structure of O-Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism

2009 ◽  
Vol 2 (12) ◽  
pp. 126001 ◽  
Author(s):  
Hirotaka Toyoda ◽  
Kazuya Goto ◽  
Tatsuo Ishijima ◽  
Tadashi Morita ◽  
Norikazu Ohshima ◽  
...  
Keyword(s):  
Fine Structure ◽  
Kinetic Energy ◽  
Energy Distribution ◽  
Formation Mechanism ◽  
Kinetic Energy Distribution ◽  
Rf Plasma

scholarly journals Energy distribution of particles generated by magnetron sputtering enhanced additional rf plasma.

Shinku ◽  
1998 ◽  
Vol 41 (3) ◽  
pp. 155-158 ◽  
Author(s):  
Noboru KASHIWAGI ◽  
Toshiki KOBAYASHI ◽  
Masaru KITAGAWA ◽  
Eiji KUSANO ◽  
Hidehito NANTO ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Energy Distribution ◽  
Rf Plasma
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