Application of the physics of plasma sheaths to the modeling of rf plasma reactors

1986 ◽  
Vol 60 (9) ◽  
pp. 3081-3087 ◽  
Author(s):  
A. Metze ◽  
D. W. Ernie ◽  
H. J. Oskam
Keyword(s):  
Rf Plasma ◽  
Plasma Reactors ◽  
Plasma Sheaths ◽  
Rf Plasma Reactors

Mass spectrometric and optical emission diagnostics for rf plasma reactors

1992 ◽  
Author(s):  
James K. Olthoff ◽  
James R. Roberts ◽  
R. J. Van Brunt ◽  
James R. Whetstone ◽  
Mark A. Sobolewski ◽  
...  
Keyword(s):  
Optical Emission ◽  
Mass Spectrometric ◽  
Rf Plasma ◽  
Plasma Reactors ◽  
Rf Plasma Reactors

Characteristics of single and dual radio-frequency (RF) plasma sheaths

2006 ◽  
Vol 1 (2) ◽  
pp. 178-185 ◽  
Author(s):  
Zhong-ling Dai ◽  
You-nian Wang
Keyword(s):  
Radio Frequency ◽  
Rf Plasma ◽  
Plasma Sheaths

Dynamics of collisionless rf plasma sheaths

1997 ◽  
Vol 82 (8) ◽  
pp. 3689-3709 ◽  
Author(s):  
Paul A. Miller ◽  
Merle E. Riley
Keyword(s):  
Rf Plasma ◽  
Plasma Sheaths

Synthesis of SiO2 Nanoparticles in RF Plasma Reactors: Effect of Feed Rate and Quench Gas Injection

2006 ◽  
Vol 4 (1) ◽  
Author(s):  
Behnam Mostajeran Goortani ◽  
Norma Mendoza ◽  
Pierre Proulx
Keyword(s):  
Plasma Reactor ◽  
Sio2 Nanoparticles ◽  
Synthesis Process ◽  
Rf Plasma ◽  
Particle Model ◽  
Reactor Wall ◽  
Equivalent Diameter ◽  
Inductively Coupled ◽  
Laser Diffractometry ◽  
Rf Plasma Reactors

Nanoparticles of SiO2 have been produced in an inductively coupled thermal plasma reactor. The resulting nanoparticles were characterized based on their morphology and size distribution. Scanning electron microscopy, nitrogen absorption (BET method), laser diffractometry and X-ray diffraction techniques were used to characterize and to measure the equivalent diameter (D(1,0), D(3,2) and D(4,3)) of the resulting nanopowders. The computational fluid dynamics (CFD) software FluentTM 6.1 with the Fine Particle Model (FPMTM) was used to simulate the whole synthesis process. The nanoparticles of SiO2 produced at the exit (filter) and on the reactor wall had primary particles diameter between 10-300 nm while the aggregates were of much larger size, between 1 and 4 micrometers. The simulation predictions were used to gain more insight into the experimental results.

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