Modeling of the sheath and the energy distribution of ions bombarding rf-biased substrates in high density plasma reactors and comparison to experimental measurements

1999 ◽  
Vol 86 (9) ◽  
pp. 4799-4812 ◽  
Author(s):  
Erik A. Edelberg ◽  
Eray S. Aydil
Keyword(s):  
Energy Distribution ◽  
High Density ◽  
Experimental Measurements ◽  
Plasma Reactors ◽  
Density Plasma

Modeling of SiO2 deposition in high density plasma reactors and comparisons of model predictions with experimental measurements

1998 ◽  
Vol 16 (2) ◽  
pp. 544-563 ◽  
Author(s):  
Ellen Meeks ◽  
Richard S. Larson ◽  
Pauline Ho ◽  
Christopher Apblett ◽  
Sang M. Han ◽  
...  
Keyword(s):  
High Density ◽  
Experimental Measurements ◽  
Plasma Reactors ◽  
Model Predictions ◽  
Density Plasma

Energy distribution of ions bombarding biased electrodes in high density plasma reactors

1999 ◽  
Vol 17 (2) ◽  
pp. 506-516 ◽  
Author(s):  
Erik A. Edelberg ◽  
Andrew Perry ◽  
Neil Benjamin ◽  
Eray S. Aydil
Keyword(s):  
Energy Distribution ◽  
High Density ◽  
Plasma Reactors ◽  
Density Plasma

Simulation of dielectric etch in high density plasma reactors

1998 ◽  
Author(s):  
Justine Johannes ◽  
Paul Miller ◽  
Demetre Economou ◽  
John Feldsein ◽  
Timothy Dalton ◽  
...  
Keyword(s):  
High Density ◽  
Plasma Reactors ◽  
Density Plasma

Diagnostics of high density plasma reactors used in the processing of electronic and photonic materials (invited) (abstract)

1992 ◽  
Vol 63 (10) ◽  
pp. 4920-4920
Author(s):  
Richard A. Gottscho ◽  
Toshiki Nakano ◽  
Nader Sadeghi ◽  
Dennis J. Trevor ◽  
T. C. Lee
Keyword(s):  
High Density ◽  
Plasma Reactors ◽  
Photonic Materials ◽  
Density Plasma

Incidence angle distributions of ions bombarding grounded surfaces in high density plasma reactors

1998 ◽  
Vol 1 (1) ◽  
pp. 75-82 ◽  
Author(s):  
E.S Aydil ◽  
B.O.M Quiniou ◽  
J.T.C Lee ◽  
J.A Gregus ◽  
R.A Gottscho
Keyword(s):  
Incidence Angle ◽  
High Density ◽  
Plasma Reactors ◽  
Density Plasma
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