scholarly journals Energy distribution of particles generated by magnetron sputtering enhanced additional rf plasma.

Shinku ◽  
1998 ◽  
Vol 41 (3) ◽  
pp. 155-158 ◽  
Author(s):  
Noboru KASHIWAGI ◽  
Toshiki KOBAYASHI ◽  
Masaru KITAGAWA ◽  
Eiji KUSANO ◽  
Hidehito NANTO ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Energy Distribution ◽  
Rf Plasma

scholarly journals Ion Energy Distribution during Magnetron Sputtering Enhanced with an Inductively Coupled rf Plasma.

Shinku ◽  
1998 ◽  
Vol 41 (3) ◽  
pp. 147-150 ◽  
Author(s):  
Masamichi MATSUURA ◽  
Tadashi YAMAMOTO ◽  
Tadashi MORITA ◽  
Toshiharu KURAUCHI
Keyword(s):  
Magnetron Sputtering ◽  
Energy Distribution ◽  
Rf Plasma ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Inductively Coupled

Ion fraction and energy distribution of Ti flux incident to substrate surface in RF-plasma enhanced magnetron sputtering

Vacuum ◽  
2000 ◽  
Vol 59 (2-3) ◽  
pp. 586-593 ◽  
Author(s):  
K Fukushima ◽  
E Kusano ◽  
N Kikuchi ◽  
T Saito ◽  
S Saiki ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Energy Distribution ◽  
Substrate Surface ◽  
Rf Plasma ◽  
Flux Incident

scholarly journals Dependence of Ar+ and Ti+ Ion Energy Distribution on dc Self Bias of the rf Inductive Coil in Inductively-coupled rf Plasma Enhanced Magnetron Sputtering.

Shinku ◽  
1999 ◽  
Vol 42 (3) ◽  
pp. 409-412
Author(s):  
Takayoshi SAITOH ◽  
Suguru SAIKI ◽  
Toshiki KOBAYASHI ◽  
Kazuhiro FUKUSHIMA ◽  
Naoto KIKUCHI ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Energy Distribution ◽  
Rf Plasma ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Inductively Coupled ◽  
Self Bias

Effects of Ar pressure on ion flux energy distribution and ion fraction in r.f.-plasma-assisted magnetron sputtering

1999 ◽  
Vol 120-121 ◽  
pp. 189-193 ◽  
Author(s):  
E. Kusano ◽  
K. Fukushima ◽  
T. Saitoh ◽  
S. Saiki ◽  
N. Kikuchi ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Energy Distribution ◽  
Ion Flux ◽  
Flux Energy

Fine Structure of O-Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism

2009 ◽  
Vol 2 (12) ◽  
pp. 126001 ◽  
Author(s):  
Hirotaka Toyoda ◽  
Kazuya Goto ◽  
Tatsuo Ishijima ◽  
Tadashi Morita ◽  
Norikazu Ohshima ◽  
...  
Keyword(s):  
Fine Structure ◽  
Kinetic Energy ◽  
Energy Distribution ◽  
Formation Mechanism ◽  
Kinetic Energy Distribution ◽  
Rf Plasma
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