Mechanical properties of diamondlike carbon films

1989 ◽  
Vol 65 (5) ◽  
pp. 1918-1922 ◽  
Author(s):  
Shigeki Hoshino ◽  
Kazutaka Fujii ◽  
Nobuaki Shohata ◽  
Hirotaka Yamaguchi ◽  
Yuji Tsukamoto ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Carbon Films ◽  
Diamondlike Carbon

Tribo-mechanical properties and biocompatibility of Ag-containing amorphous carbon films deposited onto Ti6Al4V

2021 ◽  
pp. 127384
Author(s):  
Wolfgang Tillmann ◽  
Nelson Filipe Lopes Dias ◽  
Carlo Franke ◽  
David Kokalj ◽  
Dominic Stangier ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films

Using Molecular-Beam Mass Spectrometry to Study the Pecvd of Diamondlike Carbon Films

1993 ◽  
Vol 334 ◽  
Author(s):  
I.B. Graff ◽  
R.A. Pugliese ◽  
P.R. Westmoreland
Keyword(s):  
Mass Spectrometry ◽  
Vapor Deposition ◽  
Molecular Beam ◽  
Film Growth ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Total Flow ◽  
Measured Concentration ◽  
Molecular Beam Mass Spectrometry ◽  
Diamondlike Carbon

AbstractMolecular-beam mass spectrometry has been used to study plasma-enhanced chemical vapor deposition (PECVD) of diamondlike carbon films. A threshold-ionization technique was used to identify and quantify species in the plasma. Mole fractions of H, H2, CH4, C2H2, C2H6 and Ar were measured in an 83.3% CH4/Ar mixture at a pressure of 0.1 torr and a total flow of 30 sccm. Comparisons were made between mole fractions measured at plasma powers of 25W and 50W. These results were compared to measured concentration profiles and to film growth rates.

KrF excimer laser etching of diamondlike carbon films

1992 ◽  
Author(s):  
Taras V. Kononenko ◽  
Vitali I. Konov ◽  
Victor G. Ralchenko ◽  
V. E. Strelnitsky
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Laser Etching ◽  
Diamondlike Carbon ◽  
Krf Excimer Laser
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