Deposition and properties of diamondlike carbon films produced in microwave and radio‐frequency plasma

A. Raveh; J. E. Klemberg‐Sapieha; L. Martinu; M. R. Wertheimer

doi:10.1116/1.577777

Deposition and properties of diamondlike carbon films produced in microwave and radio‐frequency plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577777 ◽

1992 ◽

Vol 10 (4) ◽

pp. 1723-1727 ◽

Cited By ~ 33

Author(s):

A. Raveh ◽

J. E. Klemberg‐Sapieha ◽

L. Martinu ◽

M. R. Wertheimer

Keyword(s):

Radio Frequency ◽

Carbon Films ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Diamondlike Carbon

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Diamond-like carbon films deposited in a dual microwave-radio-frequency plasma

Materials Science and Engineering B ◽

10.1016/0921-5107(92)90233-y ◽

1992 ◽

Vol 11 (1-4) ◽

pp. 321-324 ◽

Cited By ~ 15

Author(s):

O.M. Küttel ◽

L. Martinu ◽

D. Poitras ◽

J.E. Klemberg-Sapieha ◽

M.R. Wertheimer

Keyword(s):

Radio Frequency ◽

Carbon Films ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Microwave Radio

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Morphology and Growth Process of Carbon Films Prepared by Microwave / Radio Frequency Plasma Assisted CVD

Advanced Engineering Materials ◽

10.1002/adem.200800052 ◽

2008 ◽

Vol 10 (7) ◽

pp. 651-656 ◽

Cited By ~ 8

Author(s):

W. Kaczorowski ◽

P. Niedzielski

Keyword(s):

Radio Frequency ◽

Growth Process ◽

Carbon Films ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Microwave Radio

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Structure of amorphous hydrogenated carbon films prepared by radio frequency plasma enhanced chemical vapor deposition. An analogy with the structure zone model developed for metals

Journal of Applied Physics ◽

10.1063/1.1518795 ◽

2002 ◽

Vol 92 (11) ◽

pp. 6572-6581 ◽

Cited By ~ 16

Author(s):

B. Dumay ◽

E. Finot ◽

M. Theobald ◽

O. Legaie ◽

J. Durand ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Zone Model ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Amorphous Hydrogenated Carbon

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13.56MHz radio frequency plasma properties on hemispheric electrodes and diamond-like carbon films deposition on three-dimensional polyurethane diaphragms

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1786306 ◽

2004 ◽

Vol 22 (5) ◽

pp. 2195-2200 ◽

Cited By ~ 8

Author(s):

Yasuharu Ohgoe ◽

Kenji K. Hirakuri

Keyword(s):

Radio Frequency ◽

Three Dimensional ◽

Carbon Films ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Plasma Properties ◽

Frequency Plasma

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Investigation of radio frequency plasma for the growth of diamond like carbon films

Physics of Plasmas ◽

10.1063/1.3694855 ◽

2012 ◽

Vol 19 (3) ◽

pp. 033515 ◽

Cited By ~ 16

Author(s):

Ishpal ◽

Sushil Kumar ◽

Neeraj Dwivedi ◽

C. M. S. Rauthan

Keyword(s):

Radio Frequency ◽

Carbon Films ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Frequency Plasma

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Fabrication and Characteristics of Amorphous Carbon Films Grown in Pure Methane Plasma by using Radio Frequency Plasma Enhanced Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.1744 ◽

2003 ◽

Vol 42 (Part 1, No. 4A) ◽

pp. 1744-1748 ◽

Cited By ~ 9

Author(s):

Kyung-Jea Cho ◽

Jeong-Tak Ryu ◽

Yang-Gyu Baek ◽

Takashi Ikuno ◽

Shin-ichi Honda ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Radio Frequency Plasma ◽

Amorphous Carbon Films ◽

Frequency Plasma ◽

Pure Methane

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Deposition of amorphous nitrogenated carbon films using an alternate plasma deposition method in a dual electron cyclotron resonance-radio frequency plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581586 ◽

1999 ◽

Vol 17 (1) ◽

pp. 314-316 ◽

Cited By ~ 14

Author(s):

Junegie Hong ◽

Guy Turban

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Deposition ◽

Carbon Films ◽

Electron Cyclotron ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Frequency Plasma ◽

Nitrogenated Carbon

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Effect of Radio Frequency Power on the Properties of Hydrogenated Amorphous Carbon Films Grown by Radio Frequency Plasma-Enhanced Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.4088 ◽

2000 ◽

Vol 39 (Part 1, No. 7A) ◽

pp. 4088-4093 ◽

Cited By ~ 22

Author(s):

Yasuhiko Hayashi ◽

Kouji Hagimoto ◽

Hiroshi Ebisu ◽

Murali Krishna Kalaga ◽

Tetsuo Soga ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Radio Frequency Plasma ◽

Amorphous Carbon Films ◽

Frequency Plasma ◽

Hydrogenated Amorphous ◽

Frequency Power

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Radio-frequency plasma-enhanced chemical vapour deposition of carbon films on AISI 316LVM steel: Formation of a transition layer and metal whiskers, and their influence on coating properties

Thin Solid Films ◽

10.1016/j.tsf.2018.05.036 ◽

2018 ◽

Vol 659 ◽

pp. 16-23 ◽

Cited By ~ 2

Author(s):

Krzysztof Jastrzębski ◽

Jacek Grabarczyk

Keyword(s):

Radio Frequency ◽

Chemical Vapour Deposition ◽

Transition Layer ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Radio Frequency Plasma ◽

Coating Properties ◽

Frequency Plasma

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Characterisation of nitrogen modified diamond-like carbon films deposited by radio-frequency plasma enhanced chemical vapour deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2004.12.014 ◽

2005 ◽

Vol 14 (3-7) ◽

pp. 1073-1077 ◽

Cited By ~ 12

Author(s):

A. Dorner-Reisel ◽

L. Kübler ◽

G. Irmer ◽

G. Reisel ◽

S. Schöps ◽

...

Keyword(s):

Radio Frequency ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Frequency Plasma

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