Radiation damage of gallium arsenide induced by reactive ion etching

1987 ◽  
Vol 62 (10) ◽  
pp. 4109-4113 ◽  
Author(s):  
Tohru Hara ◽  
Hidenori Suzuki ◽  
Akio Suga ◽  
Toshiyuki Terada ◽  
Nobuyuki Toyoda
Keyword(s):  
Gallium Arsenide ◽  
Radiation Damage ◽  
Reactive Ion Etching ◽  
Ion Etching

Assessment of Surface Damage of Gallium Arsenide due to Reactive Ion Etching

1990 ◽  
Vol 190 ◽  
Author(s):  
M. S. Puttock ◽  
H. Thomas ◽  
D. V. Morgan ◽  
U. Rossow ◽  
D. R. T. Zahn ◽  
...  
Keyword(s):  
Gallium Arsenide ◽  
Reactive Ion Etching ◽  
Surface Damage ◽  
Ion Etching

Radiation Damage Evaluation in Excimer Laser Beam Irradiation and Reactive Ion Etching

1986 ◽  
Vol 25 (Part 1, No. 7) ◽  
pp. 1111-1114 ◽  
Author(s):  
Makoto Sekine ◽  
Haruo Okano ◽  
Kikuo Yamabe ◽  
Nobuo Hayasaka ◽  
Yasuhiro Horiike
Keyword(s):  
Laser Beam ◽  
Radiation Damage ◽  
Excimer Laser ◽  
Reactive Ion Etching ◽  
Damage Evaluation ◽  
Beam Irradiation ◽  
Ion Etching ◽  
Laser Beam Irradiation

Radiation damage in silicon dioxide films exposed to reactive ion etching

1979 ◽  
Vol 50 (6) ◽  
pp. 4015-4021 ◽  
Author(s):  
D. J. DiMaria ◽  
L. M. Ephrath ◽  
D. R. Young
Keyword(s):  
Silicon Dioxide ◽  
Radiation Damage ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Silicon Dioxide Films
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