Cross‐sectional transmission electron microscope study of the growth kinetics of hexagonal MoSi2on (001)Si

1987 ◽  
Vol 61 (6) ◽  
pp. 2218-2223 ◽  
Author(s):  
J. Y. Cheng ◽  
H. C. Cheng ◽  
L. J. Chen
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