Transmission electron microscope study of the dry oxidation kinetics of WSi2 on (001)Si and polycrystalline silicon

1999 ◽  
Vol 86 (7) ◽  
pp. 4018-4022 ◽  
Author(s):  
S. F. Hung ◽  
L. J. Chen
Sign in / Sign up

Export Citation Format

Share Document