Cross‐sectional transmission electron microscope study of solid phase epitaxial growth in BF+2‐implanted (001)Si
1997 ◽
Vol 36
(Part 1, No. 4A)
◽
pp. 2298-2302
◽
1991 ◽
Vol 1-2
◽
pp. 45-58
◽
1999 ◽
Vol 44
◽
pp. S27-S31
◽