Excimer laser annealing of ion‐implanted silicon

1984 ◽  
Vol 55 (4) ◽  
pp. 1125-1130 ◽  
Author(s):  
J. Narayan ◽  
O. W. Holland ◽  
C. W. White ◽  
R. T. Young
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Ion Implanted

Characterization of excimer laser annealing of ion implanted Si

1982 ◽  
Vol 3 (10) ◽  
pp. 280-283 ◽  
Author(s):  
R.T. Young ◽  
G.A. van der Leeden ◽  
J. Narayan ◽  
W.H. Christie ◽  
R.F. Wood ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Ion Implanted

Long-pulse duration excimer laser annealing of Al+ ion implanted 4H-SiC for pn junction formation

2003 ◽  
Vol 208-209 ◽  
pp. 292-297 ◽  
Author(s):  
C. Dutto ◽  
E. Fogarassy ◽  
D. Mathiot ◽  
D. Muller ◽  
P. Kern ◽  
...  
Keyword(s):  
Pulse Duration ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Pn Junction ◽  
Junction Formation ◽  
Long Pulse ◽  
Ion Implanted

Pulsed excimer laser annealing of ion implanted silicon: Characterization and solar cell fabrication

1982 ◽  
Vol 41 (10) ◽  
pp. 938-940 ◽  
Author(s):  
D. H. Lowndes ◽  
J. W. Cleland ◽  
W. H. Christie ◽  
R. E. Eby ◽  
G. E. Jellison ◽  
...  
Keyword(s):  
Solar Cell ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Solar Cell Fabrication ◽  
Cell Fabrication ◽  
Ion Implanted

Lateral Solid-Phase Recrystallization from the Crystal Seed Selectively Formed by Excimer Laser Annealing in Ge-Ion-Implanted Amorphous Silicon Films

2000 ◽  
Vol 39 (Part 1, No. 9A) ◽  
pp. 5063-5068 ◽  
Author(s):  
Jin-Wook Seo ◽  
Satoru Akiyama ◽  
Yoichiro Aya ◽  
Tomoyuki Nohda ◽  
Hiroki Hamada ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Solid Phase ◽  
Silicon Films ◽  
Excimer Laser Annealing ◽  
Phase Recrystallization ◽  
Crystal Seed ◽  
Ion Implanted

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

2000 ◽  
Vol 338-342 ◽  
pp. 873-876 ◽  
Author(s):  
Y. Hishida ◽  
Masanori Watanabe ◽  
Koichi Nakashima ◽  
Osamu Eryu
Keyword(s):  
Silicon Carbide ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Ion Implanted
Sign in / Sign up

Export Citation Format

Share Document