Electrical activation of the ion-implanted phosphorus in 4H-SiC by excimer laser annealing

2003 ◽  
Vol 93 (10) ◽  
pp. 5934-5936 ◽  
Author(s):  
Yasunori Tanaka ◽  
Hisao Tanoue ◽  
Kazuo Arai
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Electrical Activation ◽  
Excimer Laser Annealing ◽  
Ion Implanted

Electrical Activation of Boron in Si Film Using Excimer Laser Annealing

2009 ◽  
Vol 54 (9(5)) ◽  
pp. 463-466 ◽  
Author(s):  
Takashi Noguchi ◽  
Kenji Kawai ◽  
Tomoyuki Miyahira ◽  
Toshiharu Suzuki ◽  
Masateru Sato
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Electrical Activation ◽  
Excimer Laser Annealing

Characterization of excimer laser annealing of ion implanted Si

1982 ◽  
Vol 3 (10) ◽  
pp. 280-283 ◽  
Author(s):  
R.T. Young ◽  
G.A. van der Leeden ◽  
J. Narayan ◽  
W.H. Christie ◽  
R.F. Wood ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Ion Implanted

Long-pulse duration excimer laser annealing of Al+ ion implanted 4H-SiC for pn junction formation

2003 ◽  
Vol 208-209 ◽  
pp. 292-297 ◽  
Author(s):  
C. Dutto ◽  
E. Fogarassy ◽  
D. Mathiot ◽  
D. Muller ◽  
P. Kern ◽  
...  
Keyword(s):  
Pulse Duration ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Pn Junction ◽  
Junction Formation ◽  
Long Pulse ◽  
Ion Implanted

Pulsed excimer laser annealing of ion implanted silicon: Characterization and solar cell fabrication

1982 ◽  
Vol 41 (10) ◽  
pp. 938-940 ◽  
Author(s):  
D. H. Lowndes ◽  
J. W. Cleland ◽  
W. H. Christie ◽  
R. E. Eby ◽  
G. E. Jellison ◽  
...  
Keyword(s):  
Solar Cell ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Solar Cell Fabrication ◽  
Cell Fabrication ◽  
Ion Implanted

Lateral Solid-Phase Recrystallization from the Crystal Seed Selectively Formed by Excimer Laser Annealing in Ge-Ion-Implanted Amorphous Silicon Films

2000 ◽  
Vol 39 (Part 1, No. 9A) ◽  
pp. 5063-5068 ◽  
Author(s):  
Jin-Wook Seo ◽  
Satoru Akiyama ◽  
Yoichiro Aya ◽  
Tomoyuki Nohda ◽  
Hiroki Hamada ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Solid Phase ◽  
Silicon Films ◽  
Excimer Laser Annealing ◽  
Phase Recrystallization ◽  
Crystal Seed ◽  
Ion Implanted

Role of oxygen on the electrical activation of B in Ge by excimer laser annealing

2013 ◽  
Vol 211 (1) ◽  
pp. 122-125 ◽  
Author(s):  
G. Impellizzeri ◽  
E. Napolitani ◽  
R. Milazzo ◽  
S. Boninelli ◽  
M. Cuscunà ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Electrical Activation ◽  
Excimer Laser Annealing
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