Charge pumping measurements on stepped‐gate metal‐nitride‐oxide‐silicon memory transistors

H. E. Maes; S. H. Usmani

doi:10.1063/1.330021

Charge pumping measurements on stepped‐gate metal‐nitride‐oxide‐silicon memory transistors

Journal of Applied Physics ◽

10.1063/1.330021 ◽

1982 ◽

Vol 53 (10) ◽

pp. 7106-7108 ◽

Cited By ~ 8

Author(s):

H. E. Maes ◽

S. H. Usmani

Keyword(s):

Metal Nitride ◽

Charge Pumping ◽

Nitride Oxide

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Mechanism of increase in charge-pumping current of metal-nitride-oxide-silicon-field effect transistors during thick dielectric film etching using fluorocarbon gas plasma

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3456177 ◽

2010 ◽

Vol 28 (4) ◽

pp. 829-833 ◽

Cited By ~ 3

Author(s):

Yoshinari Ichihashi ◽

Yasushi Ishikawa ◽

Ryu Shimizu ◽

Seiji Samukawa

Keyword(s):

Field Effect ◽

Dielectric Film ◽

Field Effect Transistors ◽

Metal Nitride ◽

Charge Pumping ◽

Gas Plasma ◽

Nitride Oxide

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Comment on ‘Metal-nitride–oxide–silicon avalanche-injection memory’

Electronics Letters ◽

10.1049/el:19730182 ◽

1973 ◽

Vol 9 (11) ◽

pp. 252-253 ◽

Cited By ~ 2

Author(s):

P.J.T. Mellor ◽

P.J. Dunn

Keyword(s):

Metal Nitride ◽

Nitride Oxide

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The metal-nitride-oxide-silicon (MNOS) transistor—Characteristics and applications

Proceedings of the IEEE ◽

10.1109/proc.1970.7897 ◽

1970 ◽

Vol 58 (8) ◽

pp. 1207-1219 ◽

Cited By ~ 64

Author(s):

D. Frohman-Bentchkowsky

Keyword(s):

Metal Nitride ◽

Nitride Oxide

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Use of a Metal-Nitride-Oxide-Semiconductor as the Detector for a Radiation Dosimeter

IEEE Transactions on Nuclear Science ◽

10.1109/tns.1978.4329581 ◽

1978 ◽

Vol 25 (6) ◽

pp. 1613-1618 ◽

Cited By ~ 5

Author(s):

R. G. Fraass ◽

R. W. Tallon

Keyword(s):

Oxide Semiconductor ◽

Metal Nitride ◽

Nitride Oxide

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Thermally assisted hole tunneling at theAu−Si3N4interface and the energy-band diagram of metal-nitride-oxide-semiconductor structures

Physical Review B ◽

10.1103/physrevb.57.r2081 ◽

1998 ◽

Vol 57 (4) ◽

pp. R2081-R2083 ◽

Cited By ~ 66

Author(s):

V. A. Gritsenko ◽

E. E. Meerson ◽

Yu. N. Morokov

Keyword(s):

Energy Band ◽

Energy Band Diagram ◽

Oxide Semiconductor ◽

Band Diagram ◽

Metal Nitride ◽

Semiconductor Structures ◽

Nitride Oxide

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Interface state densities for metal‐nitride‐oxide‐silicon devices

Journal of Applied Physics ◽

10.1063/1.346231 ◽

1990 ◽

Vol 68 (8) ◽

pp. 4172-4177 ◽

Cited By ~ 3

Author(s):

Dan Xu ◽

Vik J. Kapoor

Keyword(s):

Interface State ◽

Metal Nitride ◽

Silicon Devices ◽

State Densities ◽

Nitride Oxide

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Degradation properties in metal‐nitride‐oxide‐semiconductor structures

Journal of Applied Physics ◽

10.1063/1.328581 ◽

1981 ◽

Vol 52 (10) ◽

pp. 6377-6385 ◽

Cited By ~ 13

Author(s):

Eiichi Suzuki ◽

Yutaka Hayashi ◽

Hisayoshi Yanai

Keyword(s):

Oxide Semiconductor ◽

Metal Nitride ◽

Semiconductor Structures ◽

Nitride Oxide ◽

Degradation Properties

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Metal-nitride-oxide IC memory retains data for meter reader

Microelectronics Reliability ◽

10.1016/0026-2714(73)90670-7 ◽

1973 ◽

Vol 12 (1) ◽

pp. 24

Keyword(s):

Metal Nitride ◽

Nitride Oxide

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A simple method of interface‐state reduction in metal‐nitride‐oxide‐semiconductor structures

Journal of Applied Physics ◽

10.1063/1.348376 ◽

1991 ◽

Vol 69 (8) ◽

pp. 4448-4450 ◽

Cited By ~ 1

Author(s):

Yea‐Dean Sheu

Keyword(s):

Interface State ◽

Oxide Semiconductor ◽

Simple Method ◽

Metal Nitride ◽

State Reduction ◽

Semiconductor Structures ◽

Nitride Oxide

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Detection of plasma produced in the interaction between an Nd:YAG laser and a metal-nitride-oxide-semiconductor-type charge-coupled device

Microwave and Optical Technology Letters ◽

10.1002/(sici)1098-2760(19971020)16:3<160::aid-mop10>3.0.co;2-9 ◽

1997 ◽

Vol 16 (3) ◽

pp. 160-162 ◽

Cited By ~ 1

Author(s):

Xiao-Wu Ni ◽

Jian Lu ◽

Zhong-Hua Shen ◽

Jian-Ping Chen ◽

Yi-Xin Zhang ◽

...

Keyword(s):

Nd:Yag Laser ◽

Oxide Semiconductor ◽

Metal Nitride ◽

Charge Coupled Device ◽

Nitride Oxide ◽

Semiconductor Type

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