Predicting the lifetime of copper/barrier/dielectric systems: Insights for designing better barriers for reducing copper ion drift/diffusion into the dielectric
2019 ◽
Vol 66
(9)
◽
pp. 3802-3808
◽
Keyword(s):
2019 ◽
Vol 66
(9)
◽
pp. 3795-3801
◽
Keyword(s):