scholarly journals Enhanced chemical vapor deposition of diamond by wavelength-matched vibrational excitations of ethylene molecules using tunable CO2 laser irradiation

2009 ◽  
Vol 105 (6) ◽  
pp. 064901 ◽  
Author(s):  
H. Ling ◽  
Z. Q. Xie ◽  
Y. Gao ◽  
T. Gebre ◽  
X. K. Shen ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Laser Irradiation ◽  
Co2 Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Vibrational Excitations ◽  
Tunable Co2 Laser

CO2-Laser-Assisted Plasma-Enhanced Chemical Vapor Deposition of Silicon Dioxide Thin Film

2001 ◽  
Vol 40 (Part 1, No. 5A) ◽  
pp. 3093-3095 ◽  
Author(s):  
Hung-Sheng Tsai ◽  
Hsin-Ching Chiu ◽  
Sheng-Hsiung Chang ◽  
Chao-Chia Cheng ◽  
Ching-Ting Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Silicon Dioxide ◽  
Co2 Laser ◽  
Vapor Deposition ◽  
Chemical Vapor

Laser chemical vapor deposition of SiC films with CO2 laser

2010 ◽  
Vol 502 (1) ◽  
pp. 238-242 ◽  
Author(s):  
Kengo Fujie ◽  
Akihiko Ito ◽  
Rong Tu ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Co2 Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films

Nanostructured carbon generated by chemical vapor deposition from acetylene on surfaces pretreated by a combination of physical and chemical methods

2000 ◽  
Vol 15 (10) ◽  
pp. 2087-2090 ◽  
Author(s):  
Andrea Siska ◽  
Zoltán Kónya ◽  
Klára Hernádi ◽  
Imre Kiricsi ◽  
Krisztián Kordás ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Laser Irradiation ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Catalytic Decomposition ◽  
Catalyst System ◽  
Cobalt Acetate ◽  
Acetate Solution ◽  
Physical And Chemical

Chemical vapor deposition of carbon nanotubes by catalytic decomposition of acetylene on V2O5 microtube crystals is presented. The catalyst was prepared by laser irradiation of vanadium sheets and treated with cobalt acetate solution. The carbon deposits generated on this novel type of catalyst were characterized by transmission electron microscopy measurements. Both carbon nanofibers and carbon nanotubes were found to be formed. This catalyst system, generated by the combined laser irradiation and chemical impregnation methods, is a new and promising way to study the differences in the mechanism of the generation of nanostructures.

Arf Laser-Induced Chemical-Vapor Deposition of Tungsten for Gate Electrodes

1988 ◽  
Vol 129 ◽  
Author(s):  
H. Matsuhashi ◽  
S. Nishikawa ◽  
S. Ohno
Keyword(s):  
Chemical Vapor Deposition ◽  
Laser Irradiation ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Mos Capacitors ◽  
Incident Laser Power ◽  
Partial Pressures ◽  
Reaction Orders ◽  
Arf Laser ◽  
The Difference

ABSTRACTThe deposition of W films by ArF laser-induced chemical-vapor deposition (LCVD) was investigated as a function of incident laser power, WF6 and H2 partial pressures, and substrate temperature. The deposition of W films by LCVD is discussed dividing that into two parts, thermal CVD (TCVD) and photon assisted CVD (PhCVD). The rate of PhCVD has been defined as the difference between the rates with and without laser irradiation. The reaction orders for PhCVD are 1, 0 with respect to WF6 and H2 partial pressures, respectively, and the rate linearly increases with increase in laser repetition rate. The activation energy in PhCVD is 0.17 eV. These facts indicate that, in LCVD, PhCVD takes place independently of TCVD and that the deposition rate in PhCVD is determined by the formation of F radicals in the dissociation of WF6 molecules by laser irradiation.MOS capacitors with LCVD-W gates were fabricated and their characteristics were compared with those with sputtered-W gates. It was shown that the level of contamination due to mobile ions in the capacitor with the LCVD-W gate was extremely low.

Preparation of YBa2Cu3O7−δ thin film by laser-assisted metal-organic chemical vapor deposition using highly volatile fluorocarbon-based Ba source

1996 ◽  
Vol 11 (11) ◽  
pp. 2698-2702 ◽  
Author(s):  
Yasuyuki Mizushima ◽  
Izumi Hirabayashi
Keyword(s):  
Chemical Vapor Deposition ◽  
Laser Irradiation ◽  
Vapor Deposition ◽  
Ybco Film ◽  
Chemical Vapor ◽  
Reaction Chamber ◽  
Organic Chemical ◽  
Krf Laser ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Superconducting oxide films of YBa2Cu3O7−δ (YBCO) were produced on magnesia (MgO) single crystalline substrates (100) by laser-assisted metal-organic chemical vapor deposition. The highly volatile Ba(hfa)2 · tetraglyme was used as a Ba source metal-organic material. Smoother surface YBCO film was obtained with KrF laser irradiation than without. However, KrF laser irradiation does not lower the temperature for formation of YBCO(123) phase. YBCO film prepared at 750 °C on the MgO substrate showed a Tc(R = 0) of 69 K, and that prepared with KrF laser irradiation was 85 K. When water was added to the reaction chamber, barium fluoride was reduced and the YBCO formation was detected at a temperature of 650 °C and higher. YBCO film prepared at the temperature of 700 °C for 40 min without KrF laser irradiation behaves as a semiconductor, and one prepared with laser irradiation showed a Tc(R = 0) of 78 K.

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