CO2 laser chemical vapor deposition of silica films in a parallel configuration: A study of gas phase phenomena

1994 ◽  
Vol 12 (2) ◽  
pp. 484-493 ◽  
Author(s):  
D. Fernández ◽  
P. González ◽  
J. Pou ◽  
E. García ◽  
J. Serra ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Co2 Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Silica Films ◽  
Parallel Configuration

Laser chemical vapor deposition of SiC films with CO2 laser

2010 ◽  
Vol 502 (1) ◽  
pp. 238-242 ◽  
Author(s):  
Kengo Fujie ◽  
Akihiko Ito ◽  
Rong Tu ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Co2 Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films

Roles of Gas Phase and Surface Photolysis in Laser Chemical Vapor Deposition from Fe(CO)5

1989 ◽  
Vol 158 ◽  
Author(s):  
Xin Xu ◽  
J.I. Steinfeld
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Photolysis ◽  
Chemical State ◽  
Xps Analysis ◽  
Laser Chemical Vapor Deposition ◽  
Iron Films

ABSTRACTThe chemical state of the carbon and oxygen incorporated in iron films formed by laser photolysis of Fe(CO)5 has been examined by profiling XPS analysis. A significant portion of the codeposited CO is photodissociated at the growing surface.

SF6 sensitized CO2-laser chemical vapor deposition of a-Ge:H

1994 ◽  
Vol 241 (1-2) ◽  
pp. 61-66 ◽  
Author(s):  
M. Barth ◽  
P. Hess ◽  
G. Mollekopf ◽  
H. Stafast
Keyword(s):  
Chemical Vapor Deposition ◽  
Co2 Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition
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