Characterization of silicon-on-insulator films with pseudo-metal-oxide-semiconductor field-effect transistor: Correlation between contact pressure, crater morphology, and series resistance

2009 ◽  
Vol 94 (1) ◽  
pp. 012111 ◽  
Author(s):  
I. Ionica ◽  
I. Savin ◽  
W. Van Den Daele ◽  
T. Nguyen ◽  
X. Mescot ◽  
...  
2003 ◽  
Vol 93 (2) ◽  
pp. 1230-1240 ◽  
Author(s):  
M. D. Croitoru ◽  
V. N. Gladilin ◽  
V. M. Fomin ◽  
J. T. Devreese ◽  
W. Magnus ◽  
...  

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