Comparative study of tunneling currents through silicon dioxide and high-κ dielectric hafnium oxide partly embedded with nanocrystals and nanotubes in metal oxide semiconductor structures

2008 ◽  
Vol 104 (3) ◽  
pp. 034313 ◽  
Author(s):  
Gargi Chakraborty ◽  
C. K. Sarkar
Keyword(s):  
Metal Oxide ◽  
Comparative Study ◽  
Silicon Dioxide ◽  
Hafnium Oxide ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Semiconductor Structures ◽  
Tunneling Currents

scholarly journals Reduction of silicon dioxide by aluminum in metal–oxide–semiconductor structures

1996 ◽  
Vol 80 (11) ◽  
pp. 6505-6509 ◽  
Author(s):  
Ferhad Dadabhai ◽  
Franco Gaspari ◽  
Stefan Zukotynski ◽  
Colby Bland
Keyword(s):  
Metal Oxide ◽  
Silicon Dioxide ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Semiconductor Structures
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