Inelastic electron tunneling spectroscopy study of metal-oxide-semiconductor diodes based on high-κ gate dielectrics

2008 ◽  
Vol 92 (1) ◽  
pp. 012113 ◽  
Author(s):  
S. L. You ◽  
C. C. Huang ◽  
C. J. Wang ◽  
H. C. Ho ◽  
J. Kwo ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Electron Tunneling ◽  
Gate Dielectrics ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Inelastic Electron ◽  
Spectroscopy Study ◽  
Inelastic Electron Tunneling Spectroscopy ◽  
Inelastic Electron Tunneling ◽  
Electron Tunneling Spectroscopy

Inelastic Electron Tunneling Spectroscopy Study of Thin Gate Dielectrics

2010 ◽  
Vol 22 (26-27) ◽  
pp. 2962-2968 ◽  
Author(s):  
James W. Reiner ◽  
Sharon Cui ◽  
Zuoguang Liu ◽  
Miaomiao Wang ◽  
Charles H. Ahn ◽  
...  
Keyword(s):  
Electron Tunneling ◽  
Gate Dielectrics ◽  
Tunneling Spectroscopy ◽  
Inelastic Electron ◽  
Spectroscopy Study ◽  
Inelastic Electron Tunneling Spectroscopy ◽  
Inelastic Electron Tunneling ◽  
Electron Tunneling Spectroscopy
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