Study on the interface thermal stability of metal-oxide-semiconductor structures by inelastic electron tunneling spectroscopy

2006 ◽  
Vol 88 (26) ◽  
pp. 262909 ◽  
Author(s):  
Chih-Feng Huang ◽  
Bing-Yue Tsui ◽  
Pei-Jer Tzeng ◽  
Lurng-Shehng Lee ◽  
Ming-Jinn Tsai
Keyword(s):  
Thermal Stability ◽  
Electron Tunneling ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Inelastic Electron ◽  
Inelastic Electron Tunneling Spectroscopy ◽  
Semiconductor Structures ◽  
Inelastic Electron Tunneling ◽  
Electron Tunneling Spectroscopy ◽  
Thermal Stability Of
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