Gap length effect on electron energy distribution in capacitive radio frequency discharges

S. J. You; S. S. Kim; Jung-Hyung Kim; Dae-Jin Seong; Yong-Hyeon Shin; H. Y. Chang

doi:10.1063/1.2805032

Gap length effect on electron energy distribution in capacitive radio frequency discharges

Applied Physics Letters ◽

10.1063/1.2805032 ◽

2007 ◽

Vol 91 (22) ◽

pp. 221501 ◽

Cited By ~ 10

Author(s):

S. J. You ◽

S. S. Kim ◽

Jung-Hyung Kim ◽

Dae-Jin Seong ◽

Yong-Hyeon Shin ◽

...

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution ◽

Length Effect ◽

Radio Frequency Discharges

Download Full-text

Electron energy distribution functions and power transfer data for radio-frequency discharges in CO2laser gas mixtures

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/23/12/020 ◽

1990 ◽

Vol 23 (12) ◽

pp. 1624-1632 ◽

Cited By ~ 8

Author(s):

T Ledig ◽

B Schroder

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Gas Mixtures ◽

Distribution Functions ◽

Power Transfer ◽

Electron Energy Distribution ◽

Transfer Data ◽

Radio Frequency Discharges ◽

Energy Distribution Functions

Download Full-text

Tailoring electron energy distribution functions through energy confinement in dual radio-frequency driven atmospheric pressure plasmas

Applied Physics Letters ◽

10.1063/1.4758463 ◽

2012 ◽

Vol 101 (15) ◽

pp. 154107 ◽

Cited By ~ 31

Author(s):

C. O'Neill ◽

J. Waskoenig ◽

T. Gans

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Atmospheric Pressure ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Confinement ◽

Atmospheric Pressure Plasmas ◽

Energy Distribution Functions

Download Full-text

Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.119.6_866 ◽

1999 ◽

Vol 119 (6) ◽

pp. 866-871 ◽

Cited By ~ 1

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Secondary Electrons ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Energy Distribution Functions

Download Full-text

Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

Applied Physics Letters ◽

10.1063/1.1363695 ◽

2001 ◽

Vol 78 (21) ◽

pp. 3187-3189 ◽

Cited By ~ 19

Author(s):

M. A. Mansour ElSabbagh ◽

M.D. Bowden ◽

K. Uchino ◽

K. Muraoka

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Thomson Scattering ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Energy Distribution Functions

Download Full-text

Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Journal of Applied Physics ◽

10.1063/1.353193 ◽

1993 ◽

Vol 73 (4) ◽

pp. 1612-1616 ◽

Cited By ~ 15

Author(s):

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Chihiro Komatsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

Download Full-text

Electron energy distribution function in He‐CO radio‐frequency plasmas: The role of vibrational and electronic superelastic collisions

Journal of Applied Physics ◽

10.1063/1.339075 ◽

1987 ◽

Vol 62 (11) ◽

pp. 4398-4403 ◽

Cited By ~ 27

Author(s):

M. Capitelli ◽

R. Celiberto ◽

C. Gorse ◽

R. Winkler ◽

J. Wilhelm

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

Download Full-text

Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas

Physics of Plasmas ◽

10.1063/1.3605021 ◽

2011 ◽

Vol 18 (7) ◽

pp. 072102 ◽

Cited By ~ 2

Author(s):

Sudeep Bhattacharjee ◽

Trevor Lafleur ◽

Christine Charles ◽

Rod Boswell

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Excitation Frequency ◽

Low Pressure ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Distribution Functions

Download Full-text

Electron Energy Distribution Functions of Surface Wave Produced Radio Frequency and Microwave Plasmas

10.1063/1.41639 ◽

1992 ◽

Author(s):

U. Kortshagen ◽

H. Schlüter

Keyword(s):

Surface Wave ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Microwave Plasmas ◽

Energy Distribution Functions

Download Full-text

Langmuir probe measurements of the electron energy distribution function in radio‐frequency plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578228 ◽

1992 ◽

Vol 10 (4) ◽

pp. 1207-1211 ◽

Cited By ~ 31

Author(s):

John V. Scanlan ◽

Michael B. Hopkins

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Langmuir Probe Measurements ◽

Probe Measurements

Download Full-text

Structure observed in measured electron energy distribution functions in capacitively coupled radio frequency hydrogen plasmas

Applied Physics Letters ◽

10.1063/1.124366 ◽

1999 ◽

Vol 75 (3) ◽

pp. 331-333 ◽

Cited By ~ 22

Author(s):

C. M. O. Mahony ◽

J. McFarland ◽

P. G. Steen ◽

W. G. Graham

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Hydrogen Plasmas ◽

Energy Distribution Functions

Download Full-text