Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model

A. Palmero; E. D. van Hattum; H. Rudolph; F. H. P. M. Habraken

doi:10.1063/1.2559790

Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model

Journal of Applied Physics ◽

10.1063/1.2559790 ◽

2007 ◽

Vol 101 (5) ◽

pp. 053306 ◽

Cited By ~ 24

Author(s):

A. Palmero ◽

E. D. van Hattum ◽

H. Rudolph ◽

F. H. P. M. Habraken

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Low Pressure ◽

Global Model

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Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy

2017 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2017.8496165 ◽

2017 ◽

Author(s):

Patrick Hermanns ◽

Bastian Hillebrand ◽

Marcel Fiebrandt ◽

Peter Awakowicz

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Low Pressure

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Characterization of a low-pressure chlorine plasma column sustained by propagating surface waves using phase-sensitive microwave interferometry and trace-rare-gas optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.3574658 ◽

2011 ◽

Vol 109 (11) ◽

pp. 113304 ◽

Cited By ~ 4

Author(s):

S. Mattei ◽

O. Boudreault ◽

R. Khare ◽

L. Stafford ◽

V. M. Donnelly

Keyword(s):

Surface Waves ◽

Plasma Column ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Rare Gas ◽

Microwave Interferometry ◽

Phase Sensitive

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Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/5.0035488 ◽

2020 ◽

Vol 128 (24) ◽

pp. 243302

Author(s):

G. Nayak ◽

M. Simeni Simeni ◽

J. Rosato ◽

N. Sadeghi ◽

P. J. Bruggeman

Keyword(s):

Atmospheric Pressure ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Broadband Absorption

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Characterization of an inductively coupled nitrogen-argon plasma by Langmuir probe combined with optical emission spectroscopy

Physics of Plasmas ◽

10.1063/1.3554706 ◽

2011 ◽

Vol 18 (2) ◽

pp. 023504 ◽

Cited By ~ 32

Author(s):

M. A. Song ◽

Y. W. Lee ◽

T. H. Chung

Keyword(s):

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Inductively Coupled

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Characterization of low-pressure microwave and radio frequency discharges in oxygen applying optical emission spectroscopy and multipole resonance probe

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/46/44/445201 ◽

2013 ◽

Vol 46 (44) ◽

pp. 445201 ◽

Cited By ~ 12

Author(s):

Simon Steves ◽

Tim Styrnoll ◽

Felix Mitschker ◽

Stefan Bienholz ◽

Bibinov Nikita ◽

...

Keyword(s):

Radio Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Radio Frequency Discharges

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Probing suprathermal electrons by trace rare gases optical emission spectroscopy in low pressure dipolar microwave plasmas excited at the electron cyclotron resonance

Physics of Plasmas ◽

10.1063/1.5045348 ◽

2018 ◽

Vol 25 (9) ◽

pp. 093511 ◽

Cited By ~ 1

Author(s):

S. Boivin ◽

X. Glad ◽

L. Latrasse ◽

A. Sarkissian ◽

L. Stafford

Keyword(s):

Cyclotron Resonance ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Electron Cyclotron Resonance ◽

Optical Emission ◽

Low Pressure ◽

Electron Cyclotron ◽

Rare Gases ◽

Microwave Plasmas ◽

Suprathermal Electrons

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Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/44/28/285203 ◽

2011 ◽

Vol 44 (28) ◽

pp. 285203 ◽

Cited By ~ 8

Author(s):

Young-Kwang Lee ◽

Se-Youn Moon ◽

Se-Jin Oh ◽

Chin-Wook Chung

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Line Ratio ◽

Ratio Method ◽

Metastable Level ◽

Level Densities ◽

Inductively Coupled

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Characterization of a CH4-RF-plasma by ion flux, Langmuir probe, and optical emission spectroscopy measurements

Diamond and Related Materials ◽

10.1016/0925-9635(92)90010-l ◽

1992 ◽

Vol 1 (2-4) ◽

pp. 121-126 ◽

Cited By ~ 19

Author(s):

M. Weiler ◽

R. Kleber ◽

K. Jung ◽

H. Ehrhardt

Keyword(s):

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Flux ◽

Rf Plasma

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Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

Applied Surface Science ◽

10.1016/j.apsusc.2018.02.185 ◽

2018 ◽

Vol 442 ◽

pp. 412-416 ◽

Cited By ~ 12

Author(s):

Shiva Mohajernia ◽

Anca Mazare ◽

Imgon Hwang ◽

Sofia Gaiaschi ◽

Patrick Chapon ◽

...

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Tio2 Nanotubes ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radio Frequency Glow Discharge ◽

Elemental Characterization

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Applicability of optical emission spectroscopy techniques for characterization of Ar and Ar/O2 discharges

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/abf61c ◽

2021 ◽

Vol 54 (27) ◽

pp. 275203

Author(s):

M Nikolić ◽

I Sepulveda ◽

C Gonzalez ◽

N Khogeer ◽

M Fernandez-Monteith

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission

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