Characterization of an inductively coupled nitrogen-argon plasma by Langmuir probe combined with optical emission spectroscopy

2011 ◽  
Vol 18 (2) ◽  
pp. 023504 ◽  
Author(s):  
M. A. Song ◽  
Y. W. Lee ◽  
T. H. Chung
Keyword(s):  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Argon Plasma ◽  
Optical Emission ◽  
Inductively Coupled

Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model

2007 ◽  
Vol 101 (5) ◽  
pp. 053306 ◽  
Author(s):  
A. Palmero ◽  
E. D. van Hattum ◽  
H. Rudolph ◽  
F. H. P. M. Habraken
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Argon Plasma ◽  
Optical Emission ◽  
Low Pressure ◽  
Global Model

LOW PRESSURE CH2Cl2 PLASMA DISCHARGE

2015 ◽  
Vol 8 (3) ◽  
pp. 2240-2248
Author(s):  
Osvaldo Flores
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Discharge ◽  
X Ray ◽  
Scanning Electron

Glow discharge of dichloromethane (DCM) was investigated employing Optical Emission Spectroscopy (OES), while the electron temperature and electron density were measured using a double Langmuir probe. Deposits formed were characterized by Scanning Electron Microscopy (SEM), X-ray Photo Fluorescence Spectroscopy (XPS) and Fourier Transform Infrared Spectroscopy (FTIR). The species identified by OES were the molecular bands of C2, C3, CH, H2, CH+, HCl+, Cl and C+. The material deposited displays a growing behavior. SEM observation shows several features which correspond to coalesce and growth mechanism. The characterization of the material deposited can explain the different stages of deposits that are formed on the electrode surface. Several factors are concerned in the complexity of the process, regarding the interaction of species formed during the plasma discharge. Involving several bonds types such as: C=C, C=C-CH2-Cl, C-C and CH.

Characterization of RF He-N2/Ar mixture plasma via Langmuir probe and optical emission spectroscopy techniques

2016 ◽  
Vol 23 (8) ◽  
pp. 083521 ◽  
Author(s):  
Maria Younus ◽  
N. U. Rehman ◽  
M. Shafiq ◽  
S. S. Hussain ◽  
M. Zakaullah ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Mixture Plasma
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