Characterization of a low-pressure chlorine plasma column sustained by propagating surface waves using phase-sensitive microwave interferometry and trace-rare-gas optical emission spectroscopy
2011 ◽
Vol 109
(11)
◽
pp. 113304
◽
S. Mattei
◽
O. Boudreault
◽
R. Khare
◽
L. Stafford
◽
V. M. Donnelly