Measurements of neutral and ion composition, neutral temperature, and electron energy distribution function in a CF4 inductively coupled plasma

Harmeet Singh; J. W. Coburn; David B. Graves

doi:10.1116/1.1354603

Measurements of neutral and ion composition, neutral temperature, and electron energy distribution function in a CF4 inductively coupled plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1354603 ◽

2001 ◽

Vol 19 (3) ◽

pp. 718-729 ◽

Cited By ~ 55

Author(s):

Harmeet Singh ◽

J. W. Coburn ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Ion Composition ◽

Inductively Coupled ◽

Neutral Temperature

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Measurements of the electron energy distribution function in molecular gases in a shielded inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.1290450 ◽

2000 ◽

Vol 88 (7) ◽

pp. 3889 ◽

Cited By ~ 52

Author(s):

Harmeet Singh ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Molecular Gases ◽

Inductively Coupled

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The nonlocal and local property of the electron energy distribution function in a low-pressure inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.1287826 ◽

2000 ◽

Vol 7 (9) ◽

pp. 3826-3828 ◽

Cited By ~ 13

Author(s):

ChinWook Chung ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Local Property ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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Measurement of the electron energy distribution function in CO2 inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.5125423 ◽

2019 ◽

Vol 26 (12) ◽

pp. 123516

Author(s):

Kyung-Hyun Kim ◽

Kwan-Yong Kim ◽

Young-Hun Hong ◽

Ho-Jun Moon ◽

Chin-Wook Chung

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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Measurements of the electron energy distribution function in molecular gases in an inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.373036 ◽

2000 ◽

Vol 87 (9) ◽

pp. 4098-4106 ◽

Cited By ~ 77

Author(s):

Harmeet Singh ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Molecular Gases ◽

Inductively Coupled

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Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.1398775 ◽

2001 ◽

Vol 90 (5) ◽

pp. 2158-2161 ◽

Cited By ~ 12

Author(s):

M. D. Bowden ◽

R. Tabata ◽

P. Suanpoot ◽

K. Uchino ◽

K. Muraoka ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in nitrogen Inductively Coupled Plasma Discharges

Chinese Physics Letters ◽

10.1088/0256-307x/20/9/334 ◽

2003 ◽

Vol 20 (9) ◽

pp. 1527-1529 ◽

Cited By ~ 3

Author(s):

Ma Jie ◽

Pu Yi-Kang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Inert Gas ◽

Gas Mixture ◽

Plasma Discharges ◽

Inductively Coupled

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Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Cited By ~ 55

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures

Plasma Sources Science and Technology ◽

10.1088/0963-0252/12/3/302 ◽

2003 ◽

Vol 12 (3) ◽

pp. 302-312 ◽

Cited By ~ 21

Author(s):

Badri Ramamurthi ◽

Demetre J Economou ◽

Igor D Kaganovich

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Plasma Density ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Power Deposition ◽

Inductively Coupled ◽

Low Pressures

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Tuning effect of inert gas mixing on electron energy distribution function in inductively coupled discharges

Plasma Physics and Controlled Fusion ◽

10.1088/0741-3335/48/1/006 ◽

2005 ◽

Vol 48 (1) ◽

pp. 61-70 ◽

Cited By ~ 15

Author(s):

Yi-Kang Pu ◽

Zhi-Gang Guo ◽

Aman-ur-Rehman ◽

Zhen-Dong Yu ◽

Jie Ma

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Inert Gas ◽

Electron Energy Distribution ◽

Gas Mixing ◽

Inductively Coupled

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Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure

Applied Science and Convergence Technology ◽

10.5757/asct.2020.29.6.157 ◽

2020 ◽

Vol 29 (6) ◽

pp. 157-161

Author(s):

Sora Lee ◽

Yejin Shon ◽

Dong-gil Kim ◽

Deuk-Chul Kwon ◽

HeeHwan Choe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Plasma Simulation ◽

Inductively Coupled ◽

Process Pressure ◽

Simulation Based

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