scholarly journals Miniaturized single-crystal silicon cantilevers for scanning force microscopy

2005 ◽  
Vol 86 (13) ◽  
pp. 134101 ◽  
Author(s):  
J. L. Yang ◽  
M. Despont ◽  
U. Drechsler ◽  
B. W. Hoogenboom ◽  
P. L. T. M. Frederix ◽  
...  
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Scanning Force Microscopy ◽  
Crystal Silicon ◽  
Force Microscopy ◽  
Scanning Force

Atomic layer wear of single‐crystal calcite in aqueous solution using scanning force microscopy

1996 ◽  
Vol 80 (5) ◽  
pp. 2680-2686 ◽  
Author(s):  
Nam‐Seok Park ◽  
Myoung‐Won Kim ◽  
S. C. Langford ◽  
J. T. Dickinson
Keyword(s):  
Aqueous Solution ◽  
Single Crystal ◽  
Atomic Layer ◽  
Scanning Force Microscopy ◽  
Force Microscopy ◽  
Scanning Force

Experimental Study on the Surface Cutting Mechanical Properties of Single Crystal Silicon in Micro-Nano Scale

2015 ◽  
Vol 1088 ◽  
pp. 779-782
Author(s):  
Xiao Jing Yang ◽  
Yong Li ◽  
Wei Xing Zhang
Keyword(s):  
Mechanical Properties ◽  
Single Crystal ◽  
Cutting Force ◽  
Silicon Surface ◽  
Single Crystal Silicon ◽  
Constant Load ◽  
Crystal Silicon ◽  
Force Microscopy ◽  
Atomic Force ◽  
The Impact

The experiment of cutting mechanical properties of single crystal silicon surface in the micro-nanoscale is researched using nanoindenter and atomic force microscopy. The result of the experiment shows that: in the constant load, the impact of different scratching velocity for single crystal silicon surface scratch groove width and chip accumulation volume are not big; but the cutting force and friction coefficient are not increases with the scratching velocity increases; when the scratching speed is certain, the size of load has a greater impact on the cutting mechanical properties of single crystal silicon surface, with the increase of the load, the cutting force increases, but the cutting force is not linearly growth.

Microtribological Studies by Using Atomic Force and Friction Force Microscopy and its Applications

1994 ◽  
Vol 332 ◽  
Author(s):  
Bharat Bhushan ◽  
Vilas N. Koinkar ◽  
J. Ruan
Keyword(s):  
Single Crystal ◽  
Friction Force ◽  
Single Crystal Silicon ◽  
Test Duration ◽  
Friction Force Microscopy ◽  
Crystal Silicon ◽  
Wear Rates ◽  
Force Microscopy ◽  
Atomic Force ◽  
Nanoindentation Hardness

ABSTRACTWe have used atomic force microscopy (AFM) and friction force microscopy (FFM) techniques for microtribological studies including microscale friction, nanowear, nanoscratching and nanoindentation hardness measurements. The microscale friction studies on a gold ruler sample demonstrated that the local variation in friction correspond to a change of local surface slope, and this correlation is explained by a friction mechanism. Directionality effect is also observed as the sample was scanned in either direction. Nanoscratching, nanowear and nanoindentation hardness studies were performed on single-crystal silicon. Wear rates of single crystal silicon are approximately constant for various loads and test duration. Nanoindentation hardness studies show that AFM technique allows the hardness measurements of surface monolayers and ultra thin films in multilayered structures at very shallow depths and low loads. The AFM technique has also been shown to be useful for nanofabrication.

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